A comparison of sensitivity standards in form metrology: Final results of the EURAMET project 649

Otto Jusko (Corresponding Author), Harald Bosse, David Flack, Björn Hemming, Marco Pisani, Ruedi Thalmann

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Abstract

Results of an intercomparison measurement of sensitivity standards are presented. The standards circulated were a flick and two multi-wave standards (MWS). The measurands were form deviation and, for the MWS only, the height of the dominant spectral components. For the flick, influences from mechanical filtering and calibration are discussed. For the MWS several influencing quantities are identified and discussed. Some of these influencing quantities may dominate the result under certain circumstances. It can be shown that standard measurement uncertainties of smaller than 25 nm can be achieved for the amplitude heights of MWS, whereas the form deviation results disagree a little more than expected compared to standard uncertainties of the order of 50 nm.
Original languageEnglish
Article number054006
JournalMeasurement Science and Technology
Volume23
Issue number5
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

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Keywords

  • form metrology
  • flick
  • multi-wave standards
  • harmonic analysis

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