A DC Voltage Reference Based on MEMS

Anu Kärkkäinen, Shakil A. Awan, A. Oja, Jukka Kyynäräinen, Antti Manninen, Nikolai Tisnek, Heikki Seppä

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

A micromechanical moving plate capacitor has been designed and fabricated for use as the key component in a DC voltage reference. The reference is based on the characteristic pull-in property of a capacitive MEMS device. New device design and characterization results are presented
Original languageEnglish
Title of host publicationConference on Precision Electromagnetic Measurements, CPEM 2004
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages170-171
ISBN (Electronic)0-7803-8494-6
ISBN (Print)0-7803-8493-8
DOIs
Publication statusPublished - 2004
MoE publication typeA4 Article in a conference publication

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