A DC Voltage Reference Based on MEMS

Anu Kärkkäinen; Shakil A. Awan; A. Oja; Jukka Kyynäräinen; Antti Manninen; Nikolai Tisnek; Heikki Seppä

doi:10.1109/CPEM.2004.305515

A DC Voltage Reference Based on MEMS

Anu Kärkkäinen
, Shakil A. Awan
, A. Oja
, Jukka Kyynäräinen
, Antti Manninen
, Nikolai Tisnek
, Heikki Seppä

National Physics Laboratory (NPL)
Centre for Metrology and Accreditation Finland (MIKES)
VTT (former employee or external)

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

A micromechanical moving plate capacitor has been designed and fabricated for use as the key component in a DC voltage reference. The reference is based on the characteristic pull-in property of a capacitive MEMS device. New device design and characterization results are presented

Original language	English
Title of host publication	Conference on Precision Electromagnetic Measurements, CPEM 2004
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	170-171
ISBN (Electronic)	978-0-7803-8494-1
ISBN (Print)	978-0-7803-8493-4
DOIs	https://doi.org/10.1109/CPEM.2004.305515
Publication status	Published - 2004
MoE publication type	A4 Article in a conference publication
Event	2004 Conference on Precision Electromagnetic Measurements, CPEM 2004 - London, United Kingdom Duration: 27 Jun 2004 → 2 Jul 2004

Conference

Conference	2004 Conference on Precision Electromagnetic Measurements, CPEM 2004
Country/Territory	United Kingdom
City	London
Period	27/06/04 → 2/07/04

Access to Document

10.1109/CPEM.2004.305515

Cite this

@inproceedings{5a88ee90d3d44e0f909ef601554d1e4f,

title = "A DC Voltage Reference Based on MEMS",

abstract = "A micromechanical moving plate capacitor has been designed and fabricated for use as the key component in a DC voltage reference. The reference is based on the characteristic pull-in property of a capacitive MEMS device. New device design and characterization results are presented",

author = "Anu K{\"a}rkk{\"a}inen and Awan, \{Shakil A.\} and A. Oja and Jukka Kyyn{\"a}r{\"a}inen and Antti Manninen and Nikolai Tisnek and Heikki Sepp{\"a}",

year = "2004",

doi = "10.1109/CPEM.2004.305515",

language = "English",

isbn = "978-0-7803-8493-4",

pages = "170--171",

booktitle = "Conference on Precision Electromagnetic Measurements, CPEM 2004",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "2004 Conference on Precision Electromagnetic Measurements, CPEM 2004 ; Conference date: 27-06-2004 Through 02-07-2004",

}

Kärkkäinen, A, Awan, SA, Oja, A, Kyynäräinen, J, Manninen, A, Tisnek, N & Seppä, H 2004, A DC Voltage Reference Based on MEMS. in Conference on Precision Electromagnetic Measurements, CPEM 2004. IEEE Institute of Electrical and Electronic Engineers, pp. 170-171, 2004 Conference on Precision Electromagnetic Measurements, CPEM 2004, London, United Kingdom, 27/06/04. https://doi.org/10.1109/CPEM.2004.305515

TY - GEN

T1 - A DC Voltage Reference Based on MEMS

AU - Kärkkäinen, Anu

AU - Awan, Shakil A.

AU - Oja, A.

AU - Kyynäräinen, Jukka

AU - Manninen, Antti

AU - Tisnek, Nikolai

AU - Seppä, Heikki

PY - 2004

Y1 - 2004

N2 - A micromechanical moving plate capacitor has been designed and fabricated for use as the key component in a DC voltage reference. The reference is based on the characteristic pull-in property of a capacitive MEMS device. New device design and characterization results are presented

AB - A micromechanical moving plate capacitor has been designed and fabricated for use as the key component in a DC voltage reference. The reference is based on the characteristic pull-in property of a capacitive MEMS device. New device design and characterization results are presented

U2 - 10.1109/CPEM.2004.305515

DO - 10.1109/CPEM.2004.305515

M3 - Conference article in proceedings

SN - 978-0-7803-8493-4

SP - 170

EP - 171

BT - Conference on Precision Electromagnetic Measurements, CPEM 2004

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 2004 Conference on Precision Electromagnetic Measurements, CPEM 2004

Y2 - 27 June 2004 through 2 July 2004

ER -

A DC Voltage Reference Based on MEMS

Abstract

Conference

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