A European MEMS Ultrasound Benchmark: Scientific White Paper

Cees Visser; Alessandro Savoia; Nenad  Mihajlovic; Rob van Schaijk; Peter Loebl; Marco Kircher; Cyril Karuthedath; Peter Ågren; Guilherme Brondani Torri; Alvise Bagolini; Dominique Gross; Bruno  Fain

A European MEMS Ultrasound Benchmark: Scientific White Paper

Cees Visser (Contributor)
, Alessandro Savoia (Contributor)
, Nenad Mihajlovic (Contributor)
, Rob van Schaijk (Contributor)
, Peter Loebl (Contributor)
, Marco Kircher (Contributor)
, Cyril Karuthedath (Contributor)
, Peter Ågren (Contributor)
, Guilherme Brondani Torri (Contributor)
, Alvise Bagolini (Contributor)
, Dominique Gross (Contributor)
, Bruno Fain (Contributor)

BA6212 Medical microsystems

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Abstract

Europe is at the forefront of the development of the MEMS ultrasound transducers. In this white paper, we summarized the results of a unique Pan-European benchmarking (ref 1) of Micromachined Ultrasonic Transducers (MUTs). The following European companies and institutes with development programs in CMUT and PMUT technology participated in this benchmark: CEA Leti, Fraunhofer Institute for Photonic Microsystems (Fraunhofer IPMS), Imec, Kessler Foundation for Research (FBK), Philips, Roma Tre University.

Original language	English
Title of host publication	A European MEMS Ultrasound Benchmark
Number of pages	44
Publication status	Published - Nov 2021
MoE publication type	B3 Non-refereed article in conference proceedings

Keywords

PMUT
CMUT
MEMS (micro electro mechanical system)
ultrasound

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https://www.polesmartpower.fr/wp-content/uploads/2022/03/CMUT-PMUT-Benchmark-Technical-Whitepaper.pdf

Cite this

Visser, C., Savoia, A., Mihajlovic, N., Schaijk, R. V., Loebl, P., Kircher, M., Karuthedath, C., Ågren, P., Brondani Torri, G., Bagolini, A., Gross, D., & Fain, B. (2021). A European MEMS Ultrasound Benchmark: Scientific White Paper . In A European MEMS Ultrasound Benchmark https://www.polesmartpower.fr/wp-content/uploads/2022/03/CMUT-PMUT-Benchmark-Technical-Whitepaper.pdf

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A2 - Loebl, Peter

A2 - Kircher, Marco

A2 - Karuthedath, Cyril

A2 - Ågren, Peter

A2 - Brondani Torri, Guilherme

A2 - Bagolini, Alvise

A2 - Gross, Dominique

A2 - Fain, Bruno

PY - 2021/11

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N2 - Europe is at the forefront of the development of the MEMS ultrasound transducers. In this white paper, we summarized the results of a unique Pan-European benchmarking (ref 1) of Micromachined Ultrasonic Transducers (MUTs). The following European companies and institutes with development programs in CMUT and PMUT technology participated in this benchmark: CEA Leti, Fraunhofer Institute for Photonic Microsystems (Fraunhofer IPMS), Imec, Kessler Foundation for Research (FBK), Philips, Roma Tre University.

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KW - PMUT

KW - CMUT

KW - MEMS (micro electro mechanical system)

KW - ultrasound

M3 - Conference article in proceedings

BT - A European MEMS Ultrasound Benchmark

ER -

A European MEMS Ultrasound Benchmark: Scientific White Paper

Abstract

Keywords

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