INIS
films
100%
acoustics
100%
resonators
100%
aluminum
100%
ferroelectric materials
100%
scandium nitrides
100%
tuning
50%
applications
37%
electric fields
37%
thickness
25%
range
25%
resonance
25%
polarization
25%
aluminium nitrides
25%
coupling
12%
thin films
12%
hysteresis
12%
ghz range
12%
frequency range
12%
filters
12%
wave forms
12%
piezoelectricity
12%
sound waves
12%
scandium
12%
Keyphrases
Film Bulk Acoustic Resonator
100%
Aluminum Scandium Nitride (AlScN)
100%
Nitride Films
100%
Coercive Field
33%
Linear Tuning
33%
Polarization Switching
33%
Al0.7Sc0.3N
33%
Hysteresis Behavior
16%
Tuning Range
16%
Wideband
16%
Frequency Response
16%
GHz Frequency
16%
High-frequency Range
16%
Bulk Acoustic Wave Resonator
16%
Scandium Oxide
16%
DC Electric Field
16%
Piezoelectric Thin Film
16%
Electromechanical Coupling Coefficient
16%
Frequency Tuning
16%
Sputtered Films
16%
Mode Resonance
16%
Series Harmonic Resonance
16%
Resonator Frequency
16%
Thickness Mode
16%
Coercive Electric Field
16%
Ferroelectric Hysteresis
16%
Switching Regime
16%
Intrinsic Polarization
16%
Al-Sc
16%
Electric Field (E-field)
16%
Large Tuning Range
16%
Intrinsically Switchable
16%
Super High Frequency
16%
Acoustic Filters
16%
Material Science
Scandium
100%
Bulk Film
100%
Nitride Compound
100%
Ferroelectric Material
100%
Aluminum
100%
Resonator
100%
Aluminum Nitride
28%
Sputtered Film
14%
Electromechanical Coupling
14%
Piezoelectricity
14%
Thin Films
14%