A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films

Jialin Wang, Mingyo Park, Stefan Mertin, Tuomas Pensala, Farrokh Ayazi, Azadeh Ansari

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)

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    Engineering & Materials Science