A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films

Jialin Wang*, Mingyo Park, Stefan Mertin, Tuomas Pensala, Farrokh Ayazi, Azadeh Ansari

*Corresponding author for this work

    Research output: Contribution to journal › Article › Scientific › peer-review

    105 Citations (Scopus)

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    Material Science