A Helmholtz resonator model for an electrostatic ultrasonic air transducer with a V-grooved backplate

Jarmo Hietanen, Jyrki Stor-Pellinen, Pentti Mattila, Fabio Tsuzuki, Ken Sasaki, Mauri Luukkala

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)

Abstract

A model for the resonance frequency of an electrostatic ultrasonic air transducer with a uniformly grooved backplate is described based on the Helmholtz resonator theory. The resonance frequency of the transducer can be determined from the shape and dimensions of the backplate's grooves and the membrane's characteristics. In the case of a V-grooved backplate, the depth of the groove and the mass per unit area of the membrane are the parameters that determinate the resonance frequency. Experimental results suggest that the tension of the membrane seems to have only a very weak influence on the resonance frequency.

Original languageEnglish
Pages (from-to)129 - 132
Number of pages4
JournalSensors and Actuators A: Physical
Volume39
Issue number2
DOIs
Publication statusPublished - 1993
MoE publication typeA1 Journal article-refereed

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