A High-kt2 Switchable Ferroelectric Al0.7Sc0.3N Film Bulk Acoustic Resonator

Jialin Wang, Mingyo Park, Stefan Mertin, Tuomas Pensala, Farrokh Ayazi, Azadeh Ansari

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Abstract

This work demonstrates the hysteresis behavior and temperature characterization of an AlScN Film bulk acoustic resonator (FBAR) with ~30% Sc/(Al+Sc) ratio. Operating at ~3 GHz, the as-fabricated FBAR exhibits a record high effective electromechanical coupling ( kt 2 ) of 18% with a mechanical quality factor ( Qm) of 328. The polarization of the FBAR can be switched from N-polar to Al-polar by using a triangular-wave signal with a peak voltage of -350 V, applied for 6 seconds at 1 kHz across a 900 nm-thick Al 0.7 Sc 0.3 N film. It is shown that the polarization switching of AlScN film not only changes the polarity of the piezoelectric coefficient (e 33 ), but also changes the series resistance of the metal-ferroelectric-metal (MFM) stack and leads to an effective “switching” of the FBAR. The frequency response of the switchable FBAR is investigated after polarization switching during 4 cycles and at elevated temperatures up to 600 K.
Original languageEnglish
Title of host publicationIFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings
PublisherIEEE Institute of Electrical and Electronic Engineers
Number of pages3
ISBN (Electronic)9781728164304
DOIs
Publication statusPublished - 22 Oct 2020
MoE publication typeA4 Article in a conference publication
EventJoint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020: Online - Virtual, Keystone, United States
Duration: 19 Jul 202023 Jul 2020

Publication series

SeriesIFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings
ISSN2375-0448

Conference

ConferenceJoint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020
Country/TerritoryUnited States
CityKeystone
Period19/07/2023/07/20

Keywords

  • Acoustic resonators
  • Aluminum Scandium Nitride
  • FBAR
  • Ferroelectric
  • Filters
  • Frequency tuning
  • Piezoelectric films

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