INIS
films
100%
acoustics
100%
resonators
100%
ferroelectric materials
100%
polarization
37%
metals
25%
coupling
12%
voltage
12%
peaks
12%
signals
12%
hysteresis
12%
stacks
12%
ghz range
12%
khz range
12%
piezoelectricity
12%
quality factor
12%
Keyphrases
Film Bulk Acoustic Resonator
100%
Ferroelectric Al0.7Sc0.3N
100%
Polarization Switching
33%
AlScN Films
33%
Hysteresis Behavior
16%
Elevated Temperature
16%
Frequency Response
16%
Series Resistance
16%
Peak Voltage
16%
Metal Stack
16%
Piezoelectric Coefficient
16%
Metal Lead
16%
Nitrogen-polar (N-polar)
16%
Electromechanical Coupling
16%
Al-Sc
16%
Mechanical Quality Factor Qm
16%
Temperature Characterization
16%
Behavior Characterization
16%
4-cycle
16%
Triangular Wave
16%
Metal-ferroelectric-metal
16%
Material Science
Bulk Film
100%
Ferroelectric Material
100%
Resonator
100%
Film
33%
Electromechanical Coupling
16%
Piezoelectricity
16%
Physics
Resonator
100%
Volume
100%
Ferroelectric Material
100%
Q Factor
16%
Piezoelectricity
16%
Engineering
Resonator
100%
Elevated Temperature
16%
Series Resistance
16%
Piezoelectric Coefficient
16%
Q Factor
16%
Frequency Response
16%