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A High-kt2 Switchable Ferroelectric Al0.7Sc0.3N Film Bulk Acoustic Resonator

  • Jialin Wang
  • , Mingyo Park
  • , Stefan Mertin
  • , Tuomas Pensala
  • , Farrokh Ayazi
  • , Azadeh Ansari
  • Georgia Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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