A metal-to-metal contact RF MEMS switch towards handsets applications

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    2 Citations (Scopus)

    Abstract

    A MEMS switch for radio frequency applications has been designed, fabricated, and characterized. The focus has been in the optimization of switch performance towards handset applications. The realized switch has actuation voltage less than 15 V for realizing a good metal-to-metal contact. Measured results show loss less than 0.25 dB up to 10 GHz with matching better than -30 dB in the down-state, and isolation better than -20 dB up to 6 GHz in the up-state. (3 refs.)
    Original languageEnglish
    Title of host publicationSmart Sensors, Actuators, and MEMS III
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-0-8194-6717-1
    DOIs
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication
    EventSPIE Microtechnologies for the New Millennium. Smart Sensors, Actuators, and MEMS III - Maspalomas, Gran Canaria, Spain
    Duration: 2 May 20074 May 2007

    Publication series

    SeriesProceedings of SPIE
    Volume6589
    ISSN0277-786X

    Conference

    ConferenceSPIE Microtechnologies for the New Millennium. Smart Sensors, Actuators, and MEMS III
    Country/TerritorySpain
    CityMaspalomas, Gran Canaria
    Period2/05/074/05/07

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