A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor

Jeremias Seppä; Virpi Korpelainen; Mikko Merimaa; Gian Bartolo Picotto; Antti Lassila

doi:10.1088/0957-0233/22/9/094027

A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor

Jeremias Seppä, Virpi Korpelainen, Mikko Merimaa, Gian Bartolo Picotto, Antti Lassila

Research output: Contribution to journal › Article › Scientific › peer-review

15 Citations (Scopus)

Abstract

This paper describes methods for dynamic measurement and correction of laser interferometer periodic nonlinearity down to the picometre level. A capacitive sensor is used as an external reference for measuring and calculating the periodic interferometer nonlinearity correction function. The experimental interferometer setup is a heterodyne interferometer with symmetrical paths to detectors and time-interval-based phase detection. The periodic nonlinearity is represented as harmonic Fourier components. The time evolution of the nonlinearity function is tracked during measurement. The method is verified by spatial and temporal repeatability of the measured nonlinearity. Linearization repeatability in the 10 pm range is observed.

Original language	English
Article number	094027
Number of pages	7
Journal	Measurement Science and Technology
Volume	22
Issue number	9
DOIs	https://doi.org/10.1088/0957-0233/22/9/094027
Publication status	Published - 2011
MoE publication type	A1 Journal article-refereed

Keywords

lasers
interferometers

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abstract = "This paper describes methods for dynamic measurement and correction of laser interferometer periodic nonlinearity down to the picometre level. A capacitive sensor is used as an external reference for measuring and calculating the periodic interferometer nonlinearity correction function. The experimental interferometer setup is a heterodyne interferometer with symmetrical paths to detectors and time-interval-based phase detection. The periodic nonlinearity is represented as harmonic Fourier components. The time evolution of the nonlinearity function is tracked during measurement. The method is verified by spatial and temporal repeatability of the measured nonlinearity. Linearization repeatability in the 10 pm range is observed.",

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AU - Seppä, Jeremias

AU - Korpelainen, Virpi

AU - Merimaa, Mikko

AU - Picotto, Gian Bartolo

AU - Lassila, Antti

PY - 2011

Y1 - 2011

N2 - This paper describes methods for dynamic measurement and correction of laser interferometer periodic nonlinearity down to the picometre level. A capacitive sensor is used as an external reference for measuring and calculating the periodic interferometer nonlinearity correction function. The experimental interferometer setup is a heterodyne interferometer with symmetrical paths to detectors and time-interval-based phase detection. The periodic nonlinearity is represented as harmonic Fourier components. The time evolution of the nonlinearity function is tracked during measurement. The method is verified by spatial and temporal repeatability of the measured nonlinearity. Linearization repeatability in the 10 pm range is observed.

AB - This paper describes methods for dynamic measurement and correction of laser interferometer periodic nonlinearity down to the picometre level. A capacitive sensor is used as an external reference for measuring and calculating the periodic interferometer nonlinearity correction function. The experimental interferometer setup is a heterodyne interferometer with symmetrical paths to detectors and time-interval-based phase detection. The periodic nonlinearity is represented as harmonic Fourier components. The time evolution of the nonlinearity function is tracked during measurement. The method is verified by spatial and temporal repeatability of the measured nonlinearity. Linearization repeatability in the 10 pm range is observed.

KW - lasers

KW - interferometers

U2 - 10.1088/0957-0233/22/9/094027

DO - 10.1088/0957-0233/22/9/094027

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