A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor

    Research output: Contribution to journalArticleScientificpeer-review

    15 Citations (Scopus)

    Abstract

    This paper describes methods for dynamic measurement and correction of laser interferometer periodic nonlinearity down to the picometre level. A capacitive sensor is used as an external reference for measuring and calculating the periodic interferometer nonlinearity correction function. The experimental interferometer setup is a heterodyne interferometer with symmetrical paths to detectors and time-interval-based phase detection. The periodic nonlinearity is represented as harmonic Fourier components. The time evolution of the nonlinearity function is tracked during measurement. The method is verified by spatial and temporal repeatability of the measured nonlinearity. Linearization repeatability in the 10 pm range is observed.
    Original languageEnglish
    Article number094027
    Number of pages7
    JournalMeasurement Science and Technology
    Volume22
    Issue number9
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed

    Keywords

    • lasers
    • interferometers

    Fingerprint Dive into the research topics of 'A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor'. Together they form a unique fingerprint.

    Cite this