A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)

Abstract

This paper describes methods for dynamic measurement and correction of laser interferometer periodic nonlinearity down to the picometre level. A capacitive sensor is used as an external reference for measuring and calculating the periodic interferometer nonlinearity correction function. The experimental interferometer setup is a heterodyne interferometer with symmetrical paths to detectors and time-interval-based phase detection. The periodic nonlinearity is represented as harmonic Fourier components. The time evolution of the nonlinearity function is tracked during measurement. The method is verified by spatial and temporal repeatability of the measured nonlinearity. Linearization repeatability in the 10 pm range is observed.
Original languageEnglish
Article number094027
Number of pages7
JournalMeasurement Science and Technology
Volume22
Issue number9
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

Fingerprint

Capacitive sensors
Laser Interferometer
linearization
Linearization
Interferometers
interferometers
nonlinearity
Nonlinearity
Sensor
Lasers
Interferometer
sensors
lasers
Repeatability
Heterodyne
p.m.
Detectors
Harmonic
Detector
intervals

Keywords

  • lasers
  • interferometers

Cite this

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title = "A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor",
abstract = "This paper describes methods for dynamic measurement and correction of laser interferometer periodic nonlinearity down to the picometre level. A capacitive sensor is used as an external reference for measuring and calculating the periodic interferometer nonlinearity correction function. The experimental interferometer setup is a heterodyne interferometer with symmetrical paths to detectors and time-interval-based phase detection. The periodic nonlinearity is represented as harmonic Fourier components. The time evolution of the nonlinearity function is tracked during measurement. The method is verified by spatial and temporal repeatability of the measured nonlinearity. Linearization repeatability in the 10 pm range is observed.",
keywords = "lasers, interferometers",
author = "Jeremias Sepp{\"a} and Virpi Korpelainen and Mikko Merimaa and Picotto, {Gian Bartolo} and Antti Lassila",
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language = "English",
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journal = "Measurement Science and Technology",
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A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor. / Seppä, Jeremias; Korpelainen, Virpi; Merimaa, Mikko; Picotto, Gian Bartolo; Lassila, Antti.

In: Measurement Science and Technology, Vol. 22, No. 9, 094027, 2011.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor

AU - Seppä, Jeremias

AU - Korpelainen, Virpi

AU - Merimaa, Mikko

AU - Picotto, Gian Bartolo

AU - Lassila, Antti

PY - 2011

Y1 - 2011

N2 - This paper describes methods for dynamic measurement and correction of laser interferometer periodic nonlinearity down to the picometre level. A capacitive sensor is used as an external reference for measuring and calculating the periodic interferometer nonlinearity correction function. The experimental interferometer setup is a heterodyne interferometer with symmetrical paths to detectors and time-interval-based phase detection. The periodic nonlinearity is represented as harmonic Fourier components. The time evolution of the nonlinearity function is tracked during measurement. The method is verified by spatial and temporal repeatability of the measured nonlinearity. Linearization repeatability in the 10 pm range is observed.

AB - This paper describes methods for dynamic measurement and correction of laser interferometer periodic nonlinearity down to the picometre level. A capacitive sensor is used as an external reference for measuring and calculating the periodic interferometer nonlinearity correction function. The experimental interferometer setup is a heterodyne interferometer with symmetrical paths to detectors and time-interval-based phase detection. The periodic nonlinearity is represented as harmonic Fourier components. The time evolution of the nonlinearity function is tracked during measurement. The method is verified by spatial and temporal repeatability of the measured nonlinearity. Linearization repeatability in the 10 pm range is observed.

KW - lasers

KW - interferometers

U2 - 10.1088/0957-0233/22/9/094027

DO - 10.1088/0957-0233/22/9/094027

M3 - Article

VL - 22

JO - Measurement Science and Technology

JF - Measurement Science and Technology

SN - 0957-0233

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