Abstract
This paper describes methods for dynamic measurement and
correction of laser interferometer periodic nonlinearity
down to the picometre level. A capacitive sensor is used
as an external reference for measuring and calculating
the periodic interferometer nonlinearity correction
function. The experimental interferometer setup is a
heterodyne interferometer with symmetrical paths to
detectors and time-interval-based phase detection. The
periodic nonlinearity is represented as harmonic Fourier
components. The time evolution of the nonlinearity
function is tracked during measurement. The method is
verified by spatial and temporal repeatability of the
measured nonlinearity. Linearization repeatability in the
10 pm range is observed.
| Original language | English |
|---|---|
| Article number | 094027 |
| Number of pages | 7 |
| Journal | Measurement Science and Technology |
| Volume | 22 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 2011 |
| MoE publication type | A1 Journal article-refereed |
Keywords
- lasers
- interferometers