Abstract
| Original language | English |
|---|---|
| Article number | 094027 |
| Number of pages | 7 |
| Journal | Measurement Science and Technology |
| Volume | 22 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 2011 |
| MoE publication type | A1 Journal article-refereed |
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Keywords
- lasers
- interferometers
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A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor. / Seppä, Jeremias; Korpelainen, Virpi; Merimaa, Mikko; Picotto, Gian Bartolo; Lassila, Antti.
In: Measurement Science and Technology, Vol. 22, No. 9, 094027, 2011.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - A method for linearization of a laser interferometer down to the picometre level with a capacitive sensor
AU - Seppä, Jeremias
AU - Korpelainen, Virpi
AU - Merimaa, Mikko
AU - Picotto, Gian Bartolo
AU - Lassila, Antti
PY - 2011
Y1 - 2011
N2 - This paper describes methods for dynamic measurement and correction of laser interferometer periodic nonlinearity down to the picometre level. A capacitive sensor is used as an external reference for measuring and calculating the periodic interferometer nonlinearity correction function. The experimental interferometer setup is a heterodyne interferometer with symmetrical paths to detectors and time-interval-based phase detection. The periodic nonlinearity is represented as harmonic Fourier components. The time evolution of the nonlinearity function is tracked during measurement. The method is verified by spatial and temporal repeatability of the measured nonlinearity. Linearization repeatability in the 10 pm range is observed.
AB - This paper describes methods for dynamic measurement and correction of laser interferometer periodic nonlinearity down to the picometre level. A capacitive sensor is used as an external reference for measuring and calculating the periodic interferometer nonlinearity correction function. The experimental interferometer setup is a heterodyne interferometer with symmetrical paths to detectors and time-interval-based phase detection. The periodic nonlinearity is represented as harmonic Fourier components. The time evolution of the nonlinearity function is tracked during measurement. The method is verified by spatial and temporal repeatability of the measured nonlinearity. Linearization repeatability in the 10 pm range is observed.
KW - lasers
KW - interferometers
U2 - 10.1088/0957-0233/22/9/094027
DO - 10.1088/0957-0233/22/9/094027
M3 - Article
VL - 22
JO - Measurement Science and Technology
JF - Measurement Science and Technology
SN - 0957-0233
IS - 9
M1 - 094027
ER -