Abstract
A method for producing a mirror plate (100) for a Fabry-Perot interferometer (700) may comprise: - providing a base slab (51), which comprises a substrate (50) coated with a reflective multilayer coating (60), - forming one or more intermediate layers (62) on the base slab (51) such that the lowermost intermediate layer (62) substantially consists of silica (SiO2), and such that the multilayer coating (60) is at least partially covered by the lowermost intermediate layer (62), - forming one or more capacitive sensor electrodes (90a, 90b) by depositing conductive material on top of the intermediate layers (62), and - removing material of the lowermost intermediate layer (62) by etching (ETCH1) in order to form an exposed aperture portion (AP1) of the multilayer coating (60).
Patent family as of 22.10.2021
DE602014001204 D1 20160504 DE201460001204T 20140613
EP2816389 A1 20141224 EP20140397523 20140613
EP2816389 B1 20160323 EP20140397523 20140613
FI125690 B 20160115 FI20130005666 20130618
FI20135666 A 20141219 FI20130005666 20130618
JP2015018232 A2 20150129 JP20140123908 20140617
JP5954801 B2 20160720 JP20140123908 20140617
US2014368825 AA 20141218 US20140306157 20140616
US9268144 BB 20160223 US20140306157 20140616
Link to current patent family on right
| Original language | English |
|---|---|
| Patent number | EP2816389 |
| IPC | G02B 27/ 10 A N |
| Priority date | 18/06/13 |
| Publication status | Published - 24 Dec 2014 |
| MoE publication type | H1 Granted patent |