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A method for producing a mirror for a Fabry-Perot interferomete
Anna Rissanen (Inventor)
, Jarkko Antila (Inventor)
Research output
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Patent
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Patent
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Keyphrases
Multilayer Coatings
100%
Fabry-Perot
100%
Silica
66%
Patent Family
66%
Base Slab
66%
Fabry-Perot Interferometer
33%
Sensing Electrode
33%
Capacitive Sensor
33%
Partially Covered
33%
Conductive Materials
33%
INIS
layers
100%
mirrors
100%
coatings
37%
patents
25%
slabs
25%
substrates
12%
sensors
12%
plates
12%
electrodes
12%
silica
12%
apertures
12%
fabry-perot interferometer
12%
etching
12%
Material Science
Interferometer
100%
Conductive Material
100%
Silicon Dioxide
100%