A micromechanical resonating RF mixer

Ari T. Alastalo (Corresponding author), M. Koskenvuori, Heikki Seppä, James Dekker

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    15 Citations (Scopus)

    Abstract

    An arrangement of microelectromechanical IPSonators is considered as a filtering mixer for RF signals. The mixing is based on the nonlinear (second-order) forcevoltage relationship of capacitive transducers that are used for electrical drive and readout of the resonator. Measured and simulated results are shown for the first prototype devices with a transducer gap of 1 pm. With the gap reduced to 100 nm, the approach is expected to reach a good mixer performance for RF frequencies up to 1 GHz. Namely, with 50 il source impedances, the combined insertion and conversion loss is expected to drop below 10 dB. The loss drops further when impedance transformation is used to raise the RF and LO source impedances seen by the resonator.
    Original languageEnglish
    Title of host publication34th European Microwave Conference 2004
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1297-1300
    ISBN (Print)1-58053-992-0
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication
    Event34th European Microwave Conference - Amsterdam, Netherlands
    Duration: 12 Oct 200414 Oct 2004

    Conference

    Conference34th European Microwave Conference
    Country/TerritoryNetherlands
    CityAmsterdam
    Period12/10/0414/10/04

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