A micromechanical resonating RF mixer

A.T. Alastalo (Corresponding author), M. Koskenvuori, H. Seppä, J. Dekker

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    13 Citations (Scopus)


    An arrangement of microelectromechanical resonators is considered as a filtering mixer for RF signals. The mixing is based on the second-order (nonlinear) force-voltage relationship of capacitive transducers that are used for electrical drive and readout of the resonator. Measured and simulated results are shown for the first prototype devices with a transducer gap of 1 $\mu$m. With the gap reduced to 100 nm by the time of the conference, the approach is expected to reach a good mixer performance for RF frequencies up to 1 GHz. With 50 $\Omega$ source impedances the combined insertion and conversion loss is expected to drop below 10 dB. The loss drop further when impedance transformation is used to raise the RF and LO source impedances seen by the resonar r.
    Original languageEnglish
    Title of host publication34th European Microwave Conference 2004
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Print)1-58053-992-0
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication
    Event34th European Microwave Conference - Amsterdam, Netherlands
    Duration: 12 Oct 200414 Oct 2004


    Conference34th European Microwave Conference

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