A micromechanical resonating RF mixer

A.T. Alastalo; M. Koskenvuori; H. Seppä; J. Dekker

A micromechanical resonating RF mixer

A.T. Alastalo (Corresponding author), M. Koskenvuori, H. Seppä, J. Dekker

BA1408 Flexible sensors and devices

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

13 Citations (Scopus)

Abstract

An arrangement of microelectromechanical resonators is considered as a filtering mixer for RF signals. The mixing is based on the second-order (nonlinear) force-voltage relationship of capacitive transducers that are used for electrical drive and readout of the resonator. Measured and simulated results are shown for the first prototype devices with a transducer gap of 1 $\mu$m. With the gap reduced to 100 nm by the time of the conference, the approach is expected to reach a good mixer performance for RF frequencies up to 1 GHz. With 50 $\Omega$ source impedances the combined insertion and conversion loss is expected to drop below 10 dB. The loss drop further when impedance transformation is used to raise the RF and LO source impedances seen by the resonar r.

Original language	English
Title of host publication	34th European Microwave Conference 2004
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	1297-1300
ISBN (Print)	1-58053-992-0
Publication status	Published - 2004
MoE publication type	A4 Article in a conference publication
Event	34th European Microwave Conference - Amsterdam, Netherlands Duration: 12 Oct 2004 → 14 Oct 2004

Conference

Conference	34th European Microwave Conference
Country	Netherlands
City	Amsterdam
Period	12/10/04 → 14/10/04

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Alastalo, A. T., Koskenvuori, M., Seppä, H., & Dekker, J. (2004). A micromechanical resonating RF mixer. In 34th European Microwave Conference 2004 (pp. 1297-1300). IEEE Institute of Electrical and Electronic Engineers. https://ieeexplore.ieee.org/abstract/document/1411249

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AB - An arrangement of microelectromechanical resonators is considered as a filtering mixer for RF signals. The mixing is based on the second-order (nonlinear) force-voltage relationship of capacitive transducers that are used for electrical drive and readout of the resonator. Measured and simulated results are shown for the first prototype devices with a transducer gap of 1 $\mu$m. With the gap reduced to 100 nm by the time of the conference, the approach is expected to reach a good mixer performance for RF frequencies up to 1 GHz. With 50 $\Omega$ source impedances the combined insertion and conversion loss is expected to drop below 10 dB. The loss drop further when impedance transformation is used to raise the RF and LO source impedances seen by the resonar r.

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