A micromechanical resonator

Aarne Oja; Tuomas Pensala; Johanna Meltaus

A micromechanical resonator

Aarne Oja (Inventor), Tuomas Pensala (Inventor), Johanna Meltaus (Inventor)

BA6201 RF microsystems

Research output: Patent › Patent

Abstract

The invention relates to a micromechanical resonator comprising a substrate (1) of first material (2), a resonator (3) suspended to the supporting structure (1), the resonator (3) being at least partially of the same material (2) as the supporting structure and dimensioned for resonation at a specific frequency f0, coupling means (5) for initiating, maintaining and coupling the resonation of the resonator (3) to an external circuit (6), and the resonator (3) including second material (4), the thermal properties of which being different from the first material (2). In accordance with the invention the resonator (3) includes the second material (4) located concentrated in specific places of the resonator (3).

Patent family as of 14.9.2021
CN102577118 A 20120711 CN201080043268 20100927
CN102577118 B 20160316 CN201080043268 20100927
DE602010035463 D1 20160922 DE201060035463T 20100927
EP2484008 A1 20120808 EP20100821619 20100927
EP2484008 A4 20140618 EP20100821619 20100927
EP2484008 B1 20160810 EP20100821619 20100927
FI20095988 A0 20090928 FI20090005988 20090928
JP2013506334 T2 20130221 JP20120530301T 20100927
JP5704614 B2 20150422 JP20120530301T 20100927
US2012229226 AA 20120913 US20100497805 20100927
WO11042597 A1 20110414 WO2010FI50744 20100927

Link to current patent family on right

Original language	English
Patent number	EP2484008
IPC	B81B 7/ 00 A N
Priority date	27/09/10
Publication status	Published - 8 Aug 2012
MoE publication type	H1 Granted patent

Cite this

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title = "A micromechanical resonator",

abstract = "The invention relates to a micromechanical resonator comprising a substrate (1) of first material (2), a resonator (3) suspended to the supporting structure (1), the resonator (3) being at least partially of the same material (2) as the supporting structure and dimensioned for resonation at a specific frequency f0, coupling means (5) for initiating, maintaining and coupling the resonation of the resonator (3) to an external circuit (6), and the resonator (3) including second material (4), the thermal properties of which being different from the first material (2). In accordance with the invention the resonator (3) includes the second material (4) located concentrated in specific places of the resonator (3).Patent family as of 14.9.2021CN102577118 A 20120711 CN201080043268 20100927 CN102577118 B 20160316 CN201080043268 20100927 DE602010035463 D1 20160922 DE201060035463T 20100927 EP2484008 A1 20120808 EP20100821619 20100927 EP2484008 A4 20140618 EP20100821619 20100927 EP2484008 B1 20160810 EP20100821619 20100927 FI20095988 A0 20090928 FI20090005988 20090928 JP2013506334 T2 20130221 JP20120530301T 20100927 JP5704614 B2 20150422 JP20120530301T 20100927 US2012229226 AA 20120913 US20100497805 20100927 WO11042597 A1 20110414 WO2010FI50744 20100927Link to current patent family on right ",

author = "Aarne Oja and Tuomas Pensala and Johanna Meltaus",

year = "2012",

month = aug,

day = "8",

language = "English",

type = "Patent",

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T1 - A micromechanical resonator

AU - Oja, Aarne

AU - Pensala, Tuomas

AU - Meltaus, Johanna

PY - 2012/8/8

Y1 - 2012/8/8

N2 - The invention relates to a micromechanical resonator comprising a substrate (1) of first material (2), a resonator (3) suspended to the supporting structure (1), the resonator (3) being at least partially of the same material (2) as the supporting structure and dimensioned for resonation at a specific frequency f0, coupling means (5) for initiating, maintaining and coupling the resonation of the resonator (3) to an external circuit (6), and the resonator (3) including second material (4), the thermal properties of which being different from the first material (2). In accordance with the invention the resonator (3) includes the second material (4) located concentrated in specific places of the resonator (3).Patent family as of 14.9.2021CN102577118 A 20120711 CN201080043268 20100927 CN102577118 B 20160316 CN201080043268 20100927 DE602010035463 D1 20160922 DE201060035463T 20100927 EP2484008 A1 20120808 EP20100821619 20100927 EP2484008 A4 20140618 EP20100821619 20100927 EP2484008 B1 20160810 EP20100821619 20100927 FI20095988 A0 20090928 FI20090005988 20090928 JP2013506334 T2 20130221 JP20120530301T 20100927 JP5704614 B2 20150422 JP20120530301T 20100927 US2012229226 AA 20120913 US20100497805 20100927 WO11042597 A1 20110414 WO2010FI50744 20100927Link to current patent family on right

AB - The invention relates to a micromechanical resonator comprising a substrate (1) of first material (2), a resonator (3) suspended to the supporting structure (1), the resonator (3) being at least partially of the same material (2) as the supporting structure and dimensioned for resonation at a specific frequency f0, coupling means (5) for initiating, maintaining and coupling the resonation of the resonator (3) to an external circuit (6), and the resonator (3) including second material (4), the thermal properties of which being different from the first material (2). In accordance with the invention the resonator (3) includes the second material (4) located concentrated in specific places of the resonator (3).Patent family as of 14.9.2021CN102577118 A 20120711 CN201080043268 20100927 CN102577118 B 20160316 CN201080043268 20100927 DE602010035463 D1 20160922 DE201060035463T 20100927 EP2484008 A1 20120808 EP20100821619 20100927 EP2484008 A4 20140618 EP20100821619 20100927 EP2484008 B1 20160810 EP20100821619 20100927 FI20095988 A0 20090928 FI20090005988 20090928 JP2013506334 T2 20130221 JP20120530301T 20100927 JP5704614 B2 20150422 JP20120530301T 20100927 US2012229226 AA 20120913 US20100497805 20100927 WO11042597 A1 20110414 WO2010FI50744 20100927Link to current patent family on right

UR - https://worldwide.espacenet.com/patent/search/family/041136448/publication/EP2484008A1?q=EP2484008

M3 - Patent

M1 - EP2484008

ER -

A micromechanical resonator

Abstract

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