A micromechanical resonator

Aarne Oja (Inventor), Tuomas Pensala (Inventor), Johanna Meltaus (Inventor)

Research output: PatentPatent


The invention relates to a micromechanical resonator comprising a substrate (1) of first material (2), a resonator (3) suspended to the supporting structure (1), the resonator (3) being at least partially of the same material (2) as the supporting structure and dimensioned for resonation at a specific frequency f0, coupling means (5) for initiating, maintaining and coupling the resonation of the resonator (3) to an external circuit (6), and the resonator (3) including second material (4), the thermal properties of which being different from the first material (2). In accordance with the invention the resonator (3) includes the second material (4) located concentrated in specific places of the resonator (3).

Patent family as of 14.9.2021
CN102577118 A 20120711 CN201080043268 20100927      
CN102577118 B 20160316 CN201080043268 20100927      
DE602010035463 D1 20160922 DE201060035463T 20100927      
EP2484008 A1 20120808 EP20100821619 20100927      
EP2484008 A4 20140618 EP20100821619 20100927      
EP2484008 B1 20160810 EP20100821619 20100927      
FI20095988 A0 20090928 FI20090005988 20090928      
JP2013506334 T2 20130221 JP20120530301T 20100927      
JP5704614 B2 20150422 JP20120530301T 20100927      
US2012229226 AA 20120913 US20100497805 20100927      
WO11042597 A1 20110414 WO2010FI50744 20100927

Link to current patent family on right 

Original languageEnglish
Patent numberEP2484008
IPCB81B 7/ 00 A N
Priority date27/09/10
Publication statusPublished - 8 Aug 2012
MoE publication typeH1 Granted patent


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