A miniature timing microsystem using two silicon resonators

D. Ruffieux; J. Baborowski; N. Scolari; T.C. Le; Antti Jaakkola; Tuomas Pensala; James Dekker; C.A. Manier; K. Zoschke; H. Oppermann

doi:10.1109/EFTF-IFC.2013.6702234

A miniature timing microsystem using two silicon resonators

D. Ruffieux
, J. Baborowski
, N. Scolari
, T.C. Le
, Antti Jaakkola
, Tuomas Pensala
, James Dekker
, C.A. Manier
, K. Zoschke
, H. Oppermann

Centre Suisse d'Electronique et de Microtechnique S.A. (CSEM)
VTT (former employee or external)
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

2 Citations (Scopus)

Abstract

This paper presents a miniature timing microsystem based on a pair of co-integrated low and high frequency silicon resonators -430kHz or 522kHz and 26MHz respectively-so as to implement a µW-level accurate, low power, temperature-compensated real time clock (RTC) and to generate low noise, low jitter clocks at any frequency between 1-50MHz in a reconfigurable way at less than 10mW power dissipation

Original language	English
Title of host publication	2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC)
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	750-753
ISBN (Electronic)	978-1-4799-0342-9
ISBN (Print)	978-1-4799-0341-2
DOIs	https://doi.org/10.1109/EFTF-IFC.2013.6702234
Publication status	Published - 2013
MoE publication type	A4 Article in a conference publication
Event	Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013 - Prague, Czech Republic Duration: 21 Jul 2013 → 25 Jul 2013

Conference

Conference	Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013
Abbreviated title	EFTF/IFC 2013
Country/Territory	Czech Republic
City	Prague
Period	21/07/13 → 25/07/13

Keywords

3-D integration
CMOS
hybrid integration
programmable clocks
RTC
silicon resonators
TCMO
timing
TSV

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10.1109/EFTF-IFC.2013.6702234

Cite this

Ruffieux, D., Baborowski, J., Scolari, N., Le, T. C., Jaakkola, A., Pensala, T., Dekker, J., Manier, C. A., Zoschke, K., & Oppermann, H. (2013). A miniature timing microsystem using two silicon resonators. In 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) (pp. 750-753). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/EFTF-IFC.2013.6702234

@inproceedings{8d638f5e29f84c1c926fd8863423fec6,

title = "A miniature timing microsystem using two silicon resonators",

abstract = "This paper presents a miniature timing microsystem based on a pair of co-integrated low and high frequency silicon resonators -430kHz or 522kHz and 26MHz respectively-so as to implement a µW-level accurate, low power, temperature-compensated real time clock (RTC) and to generate low noise, low jitter clocks at any frequency between 1-50MHz in a reconfigurable way at less than 10mW power dissipation",

keywords = "3-D integration, CMOS, hybrid integration, programmable clocks, RTC, silicon resonators, TCMO, timing, TSV",

author = "D. Ruffieux and J. Baborowski and N. Scolari and T.C. Le and Antti Jaakkola and Tuomas Pensala and James Dekker and C.A. Manier and K. Zoschke and H. Oppermann",

year = "2013",

doi = "10.1109/EFTF-IFC.2013.6702234",

language = "English",

isbn = "978-1-4799-0341-2",

pages = "750--753",

booktitle = "2013 Joint European Frequency and Time Forum \& International Frequency Control Symposium (EFTF/IFC)",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013, EFTF/IFC 2013 ; Conference date: 21-07-2013 Through 25-07-2013",

}

Ruffieux, D, Baborowski, J, Scolari, N, Le, TC, Jaakkola, A, Pensala, T, Dekker, J, Manier, CA, Zoschke, K & Oppermann, H 2013, A miniature timing microsystem using two silicon resonators. in 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC). IEEE Institute of Electrical and Electronic Engineers, pp. 750-753, Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013, Prague, Czech Republic, 21/07/13. https://doi.org/10.1109/EFTF-IFC.2013.6702234

A miniature timing microsystem using two silicon resonators. / Ruffieux, D.; Baborowski, J.; Scolari, N. et al.
2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC). IEEE Institute of Electrical and Electronic Engineers, 2013. p. 750-753.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - A miniature timing microsystem using two silicon resonators

AU - Ruffieux, D.

AU - Baborowski, J.

AU - Scolari, N.

AU - Le, T.C.

AU - Jaakkola, Antti

AU - Pensala, Tuomas

AU - Dekker, James

AU - Manier, C.A.

AU - Zoschke, K.

AU - Oppermann, H.

PY - 2013

Y1 - 2013

N2 - This paper presents a miniature timing microsystem based on a pair of co-integrated low and high frequency silicon resonators -430kHz or 522kHz and 26MHz respectively-so as to implement a µW-level accurate, low power, temperature-compensated real time clock (RTC) and to generate low noise, low jitter clocks at any frequency between 1-50MHz in a reconfigurable way at less than 10mW power dissipation

AB - This paper presents a miniature timing microsystem based on a pair of co-integrated low and high frequency silicon resonators -430kHz or 522kHz and 26MHz respectively-so as to implement a µW-level accurate, low power, temperature-compensated real time clock (RTC) and to generate low noise, low jitter clocks at any frequency between 1-50MHz in a reconfigurable way at less than 10mW power dissipation

KW - 3-D integration

KW - CMOS

KW - hybrid integration

KW - programmable clocks

KW - RTC

KW - silicon resonators

KW - TCMO

KW - timing

KW - TSV

U2 - 10.1109/EFTF-IFC.2013.6702234

DO - 10.1109/EFTF-IFC.2013.6702234

M3 - Conference article in proceedings

SN - 978-1-4799-0341-2

SP - 750

EP - 753

BT - 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC)

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013

Y2 - 21 July 2013 through 25 July 2013

ER -

A miniature timing microsystem using two silicon resonators

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Keywords

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