A miniaturised gas sensor based on a micromachined fabry-perot interferometer

Heikki Saari, Rami Mannila, Jarkko Antila, Martti Blomberg, Outi Rusanen, Jussi Tenhunen, Raimo Rikola

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientific

Original languageEnglish
Title of host publicationAutomation Technology Review 2000
PublisherVTT Technical Research Centre of Finland
Publication statusPublished - 2000
MoE publication typeNot Eligible

Publication series

SeriesAutomation Technology Review

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