A miniaturised gas sensor based on a micromachined fabry-perot interferometer

Heikki Saari, Rami Mannila, Jarkko Antila, Martti Blomberg, Outi Rusanen, Jussi Tenhunen, Raimo Rikola

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientific

Original languageEnglish
Title of host publicationAutomation Technology Review 2000
PublisherVTT Technical Research Centre of Finland
Pages13-19
Publication statusPublished - 2000
MoE publication typeNot Eligible

Publication series

SeriesAutomation Technology Review
ISSN1459-1804

Cite this

Saari, H., Mannila, R., Antila, J., Blomberg, M., Rusanen, O., Tenhunen, J., & Rikola, R. (2000). A miniaturised gas sensor based on a micromachined fabry-perot interferometer. In Automation Technology Review 2000 (pp. 13-19). VTT Technical Research Centre of Finland. Automation Technology Review