A miniaturised gas sensor based on a micromachined fabry-perot interferometer

Heikki Saari, Rami Mannila, Jarkko Antila, Martti Blomberg, Outi Rusanen, Jussi Tenhunen, Raimo Rikola

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientific

    Original languageEnglish
    Title of host publicationAutomation Technology Review 2000
    PublisherVTT Technical Research Centre of Finland
    Publication statusPublished - 2000
    MoE publication typeNot Eligible

    Publication series

    SeriesAutomation Technology Review

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