A miniaturised gas sensor based on a micromachined fabry-perot interferometer

Heikki Saari, Rami Mannila, Jarkko Antila, Martti Blomberg, Outi Rusanen, Jussi Tenhunen, Raimo Rikola

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific

Original language	English
Title of host publication	Automation Technology Review 2000
Publisher	VTT Technical Research Centre of Finland
Pages	13-19
Publication status	Published - 2000
MoE publication type	Not Eligible

Series	Automation Technology Review
ISSN	1459-1804

Cite this

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title = "A miniaturised gas sensor based on a micromachined fabry-perot interferometer",

author = "Heikki Saari and Rami Mannila and Jarkko Antila and Martti Blomberg and Outi Rusanen and Jussi Tenhunen and Raimo Rikola",

year = "2000",

language = "English",

series = "Automation Technology Review",

publisher = "VTT Technical Research Centre of Finland",

pages = "13--19",

booktitle = "Automation Technology Review 2000",

address = "Finland",

}

TY - CHAP

T1 - A miniaturised gas sensor based on a micromachined fabry-perot interferometer

AU - Saari, Heikki

AU - Mannila, Rami

AU - Antila, Jarkko

AU - Blomberg, Martti

AU - Rusanen, Outi

AU - Tenhunen, Jussi

AU - Rikola, Raimo

PY - 2000

Y1 - 2000

M3 - Chapter or book article

T3 - Automation Technology Review

SP - 13

EP - 19

BT - Automation Technology Review 2000

PB - VTT Technical Research Centre of Finland

ER -