Abstract
Practical assessment of risks for Electrostatic Discharge
(ESD) failures of semiconductor devices, due to charges
induced on devices in a manufacturing or repair
environment of electronics has been difficult, because
easily measurable parameters such as the electrostatic
field and the potential of a charged surface do not
directly quantify the risk. In this paper a new method of
assessing the risks with induction charging of a
sensitive device is presented by introducing a
well-defined dummy device, which is a simple modification
of the probe of DC type non-contacting electrostatic
voltmeter. By placing the modified potential probe
(mimicking large sensitive device) in front of charged
surface, risks of ESD failure for a device due to
induction charging can be assessed. The electrostatic
response of the probe at different distances between
charged surface and the probe has been verified by
numerical model calculations. (6 refs.)
| Original language | English |
|---|---|
| Article number | 012035 |
| Number of pages | 4 |
| Journal | Journal of Physics: Conference Series |
| Volume | 142 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2008 |
| MoE publication type | A4 Article in a conference publication |
| Event | Electrostatics 2007 - Oxford, United Kingdom Duration: 25 Mar 2007 → 29 Mar 2007 |