A multiloop SQUID and a SQUID array with 1-µm and submicrometer input coils

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    We have constructed a niobium multiloop SQUID current sensor and a 60-SQUID series array as a mix-and-match fabrication experiment utilizing our in-house projection stepper. The multiloop SQUID includes an input coil with a linewidth of 0.8 μm and a pitch of 1.6 μm, resulting in the mutual inductance M -1 = 1.8 μA/Φ 0 . The SQUID array is built on the same chip as the second-stage amplifier. The array and the multiloop showed white flux noise of 0.2 and 0.8 μΦ 0 Hz -1/2 at 4.2 K, respectively. Owing to the well-balanced gradiometric narrow-line construction, the two-SQUID system can be cooled down in the Earth's magnetic field and can be operated without superconducting or mu-metal shields. Excess low frequency noise was observed, whose possible origin in Josephson dynamics has been briefly studied with numerical simulation.
    Original languageEnglish
    Article number1600105
    JournalIEEE Transactions on Applied Superconductivity
    Issue number4
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed


    • Frequency-division multiplexing
    • magnetic resonance imaging (MRI)
    • magnetoencephalography (MEG)
    • SQUIDs


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