A new method for simultaneous characterization of process cleanliness and true particle removal efficiency

N. Henelius, Olli Anttila, Hannu Ronkainen, Jyrki Molarius

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publication184th Electrochemical Society Fall Meeting
    Subtitle of host publicationPreprinted Extended Abstracts
    PublisherElectrochemical Society ECS
    ISBN (Print)978-1-5667-7032-3
    Publication statusPublished - 1993
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event184th Electrochemical Society Meeting - New Orleans, United States
    Duration: 10 Oct 199315 Oct 1993


    Conference184th Electrochemical Society Meeting
    Country/TerritoryUnited States
    CityNew Orleans

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