A new method for simultaneous characterization of process cleanliness and true particle removal efficiency

N. Henelius, Olli Anttila, Hannu Ronkainen, Jyrki Molarius

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	184th Electrochemical Society Fall Meeting
Subtitle of host publication	Preprinted Extended Abstracts
Publisher	Electrochemical Society ECS
Pages	514-515
ISBN (Print)	978-1-5667-7032-3
Publication status	Published - 1993
MoE publication type	B3 Non-refereed article in conference proceedings
Event	184th Electrochemical Society Meeting - New Orleans, United States Duration: 10 Oct 1993 → 15 Oct 1993

Conference	184th Electrochemical Society Meeting
Country/Territory	United States
City	New Orleans
Period	10/10/93 → 15/10/93

Cite this

@inproceedings{8d9f08f4787d4c45b32a15831236652e,

title = "A new method for simultaneous characterization of process cleanliness and true particle removal efficiency",

author = "N. Henelius and Olli Anttila and Hannu Ronkainen and Jyrki Molarius",

note = "Project code: PUO1034; 184th Electrochemical Society Meeting ; Conference date: 10-10-1993 Through 15-10-1993",

year = "1993",

language = "English",

isbn = "978-1-5667-7032-3",

pages = "514--515",

booktitle = "184th Electrochemical Society Fall Meeting",

publisher = "Electrochemical Society ECS",

address = "United States",

}

Henelius, N, Anttila, O, Ronkainen, H & Molarius, J 1993, A new method for simultaneous characterization of process cleanliness and true particle removal efficiency. in 184th Electrochemical Society Fall Meeting: Preprinted Extended Abstracts. Electrochemical Society ECS, pp. 514-515, 184th Electrochemical Society Meeting, New Orleans, Louisiana, United States, 10/10/93.

A new method for simultaneous characterization of process cleanliness and true particle removal efficiency. / Henelius, N.; Anttila, Olli; Ronkainen, Hannu et al.
184th Electrochemical Society Fall Meeting: Preprinted Extended Abstracts. Electrochemical Society ECS, 1993. p. 514-515.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - A new method for simultaneous characterization of process cleanliness and true particle removal efficiency

AU - Henelius, N.

AU - Anttila, Olli

AU - Ronkainen, Hannu

AU - Molarius, Jyrki

N1 - Project code: PUO1034

PY - 1993

Y1 - 1993

M3 - Conference article in proceedings

SN - 978-1-5667-7032-3

SP - 514

EP - 515

BT - 184th Electrochemical Society Fall Meeting

PB - Electrochemical Society ECS

T2 - 184th Electrochemical Society Meeting

Y2 - 10 October 1993 through 15 October 1993

ER -