A new method for simultaneous characterization of process cleanliness and true particle removal efficiency

N. Henelius, Olli Anttila, Hannu Ronkainen, Jyrki Molarius

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publication184th Electrochemical Society Fall Meeting
    Subtitle of host publicationPreprinted Extended Abstracts
    PublisherElectrochemical Society ECS
    Pages514-515
    ISBN (Print)978-1-5667-7032-3
    Publication statusPublished - 1993
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event184th Electrochemical Society Meeting - New Orleans, United States
    Duration: 10 Oct 199315 Oct 1993

    Conference

    Conference184th Electrochemical Society Meeting
    CountryUnited States
    CityNew Orleans
    Period10/10/9315/10/93

    Cite this

    Henelius, N., Anttila, O., Ronkainen, H., & Molarius, J. (1993). A new method for simultaneous characterization of process cleanliness and true particle removal efficiency. In 184th Electrochemical Society Fall Meeting: Preprinted Extended Abstracts (pp. 514-515). Electrochemical Society ECS.