A Nordic approach to novel micro and nanotechnology

Jussi Tuovinen, Jouni Ahopelto, Janne Aikio, Pentti Karioja, Hannu Kattelus, Terho Kololuoma, Harri Kopola, Aarne Oja, Tauno Vähä-Heikkilä

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


An overview of microand nanotechnologies at VTT Technical Research Centre of Finland is presented. Novel research is carried out at several areas. Related to micro and nanoelectronics, an efficient way for manufacturing nanoscale components using nanopattering as well as superconductor-semiconductor-superconductor (SSmS) microcooler is presented. MEMS activities include development of a high quality 13 MHz reference oscillator and integrated CMOS and MEMS circuits for pressure sensing. Micromodules and structures based LTCC are described. At microwaves and millimetre waves, impedance tuners and matching networks for 4 to 100 GHz are depict. Summary on roll-to-roll printed electronics for making organic light emitting diodes (OLED), diffractive ROM memories and other components is given.
Original languageEnglish
Title of host publicationProceedings of 5th ESA/ESTEC
PublisherEuropean Space Agency (ESA)
Number of pages9
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
Event5th ESA/ESTEC: Round Table on Micro/Nano Technologies for Space - Noordwijk, Netherlands
Duration: 3 Oct 20055 Oct 2005


Conference5th ESA/ESTEC


  • nano
  • micro
  • mems

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