A Nordic approach to novel micro and nanotechnology

Jussi Tuovinen, Jouni Ahopelto, Janne Aikio, Pentti Karioja, Hannu Kattelus, Terho Kololuoma, Harri Kopola, Aarne Oja, Tauno Vähä-Heikkilä

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

An overview of microand nanotechnologies at VTT Technical Research Centre of Finland is presented. Novel research is carried out at several areas. Related to micro and nanoelectronics, an efficient way for manufacturing nanoscale components using nanopattering as well as superconductor-semiconductor-superconductor (SSmS) microcooler is presented. MEMS activities include development of a high quality 13 MHz reference oscillator and integrated CMOS and MEMS circuits for pressure sensing. Micromodules and structures based LTCC are described. At microwaves and millimetre waves, impedance tuners and matching networks for 4 to 100 GHz are depict. Summary on roll-to-roll printed electronics for making organic light emitting diodes (OLED), diffractive ROM memories and other components is given.
Original languageEnglish
Title of host publicationProceedings of 5th ESA/ESTEC
PublisherEuropean Space Agency ESA
Number of pages9
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
Event5th ESA/ESTEC: Round Table on Micro/Nano Technologies for Space - Noordwijk, Netherlands
Duration: 3 Oct 20055 Oct 2005

Conference

Conference5th ESA/ESTEC
CountryNetherlands
CityNoordwijk
Period3/10/055/10/05

Fingerprint

Nanotechnology
Superconducting materials
MEMS
Tuners
ROM
Nanoelectronics
Organic light emitting diodes (OLED)
Millimeter waves
Electronic equipment
Microwaves
Semiconductor materials
Data storage equipment
Networks (circuits)

Keywords

  • nano
  • micro
  • mems

Cite this

Tuovinen, J., Ahopelto, J., Aikio, J., Karioja, P., Kattelus, H., Kololuoma, T., ... Vähä-Heikkilä, T. (2005). A Nordic approach to novel micro and nanotechnology. In Proceedings of 5th ESA/ESTEC European Space Agency ESA.
Tuovinen, Jussi ; Ahopelto, Jouni ; Aikio, Janne ; Karioja, Pentti ; Kattelus, Hannu ; Kololuoma, Terho ; Kopola, Harri ; Oja, Aarne ; Vähä-Heikkilä, Tauno. / A Nordic approach to novel micro and nanotechnology. Proceedings of 5th ESA/ESTEC. European Space Agency ESA, 2005.
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title = "A Nordic approach to novel micro and nanotechnology",
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Tuovinen, J, Ahopelto, J, Aikio, J, Karioja, P, Kattelus, H, Kololuoma, T, Kopola, H, Oja, A & Vähä-Heikkilä, T 2005, A Nordic approach to novel micro and nanotechnology. in Proceedings of 5th ESA/ESTEC. European Space Agency ESA, 5th ESA/ESTEC, Noordwijk, Netherlands, 3/10/05.

A Nordic approach to novel micro and nanotechnology. / Tuovinen, Jussi; Ahopelto, Jouni; Aikio, Janne; Karioja, Pentti; Kattelus, Hannu; Kololuoma, Terho; Kopola, Harri; Oja, Aarne; Vähä-Heikkilä, Tauno.

Proceedings of 5th ESA/ESTEC. European Space Agency ESA, 2005.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - A Nordic approach to novel micro and nanotechnology

AU - Tuovinen, Jussi

AU - Ahopelto, Jouni

AU - Aikio, Janne

AU - Karioja, Pentti

AU - Kattelus, Hannu

AU - Kololuoma, Terho

AU - Kopola, Harri

AU - Oja, Aarne

AU - Vähä-Heikkilä, Tauno

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N2 - An overview of microand nanotechnologies at VTT Technical Research Centre of Finland is presented. Novel research is carried out at several areas. Related to micro and nanoelectronics, an efficient way for manufacturing nanoscale components using nanopattering as well as superconductor-semiconductor-superconductor (SSmS) microcooler is presented. MEMS activities include development of a high quality 13 MHz reference oscillator and integrated CMOS and MEMS circuits for pressure sensing. Micromodules and structures based LTCC are described. At microwaves and millimetre waves, impedance tuners and matching networks for 4 to 100 GHz are depict. Summary on roll-to-roll printed electronics for making organic light emitting diodes (OLED), diffractive ROM memories and other components is given.

AB - An overview of microand nanotechnologies at VTT Technical Research Centre of Finland is presented. Novel research is carried out at several areas. Related to micro and nanoelectronics, an efficient way for manufacturing nanoscale components using nanopattering as well as superconductor-semiconductor-superconductor (SSmS) microcooler is presented. MEMS activities include development of a high quality 13 MHz reference oscillator and integrated CMOS and MEMS circuits for pressure sensing. Micromodules and structures based LTCC are described. At microwaves and millimetre waves, impedance tuners and matching networks for 4 to 100 GHz are depict. Summary on roll-to-roll printed electronics for making organic light emitting diodes (OLED), diffractive ROM memories and other components is given.

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KW - micro

KW - mems

M3 - Conference article in proceedings

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PB - European Space Agency ESA

ER -

Tuovinen J, Ahopelto J, Aikio J, Karioja P, Kattelus H, Kololuoma T et al. A Nordic approach to novel micro and nanotechnology. In Proceedings of 5th ESA/ESTEC. European Space Agency ESA. 2005