A Nordic approach to novel micro and nanotechnology

Jussi Tuovinen; Jouni Ahopelto; Janne Aikio; Pentti Karioja; Hannu Kattelus; Terho Kololuoma; Harri Kopola; Aarne Oja; Tauno Vähä-Heikkilä

A Nordic approach to novel micro and nanotechnology

Jussi Tuovinen, Jouni Ahopelto, Janne Aikio, Pentti Karioja, Hannu Kattelus, Terho Kololuoma, Harri Kopola, Aarne Oja, Tauno Vähä-Heikkilä

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

An overview of microand nanotechnologies at VTT Technical Research Centre of Finland is presented. Novel research is carried out at several areas. Related to micro and nanoelectronics, an efficient way for manufacturing nanoscale components using nanopattering as well as superconductor-semiconductor-superconductor (SSmS) microcooler is presented. MEMS activities include development of a high quality 13 MHz reference oscillator and integrated CMOS and MEMS circuits for pressure sensing. Micromodules and structures based LTCC are described. At microwaves and millimetre waves, impedance tuners and matching networks for 4 to 100 GHz are depict. Summary on roll-to-roll printed electronics for making organic light emitting diodes (OLED), diffractive ROM memories and other components is given.

Original language	English
Title of host publication	Proceedings of 5th ESA/ESTEC
Publisher	European Space Agency (ESA)
Number of pages	9
Publication status	Published - 2005
MoE publication type	A4 Article in a conference publication
Event	5th ESA/ESTEC: Round Table on Micro/Nano Technologies for Space - Noordwijk, Netherlands Duration: 3 Oct 2005 → 5 Oct 2005

Conference

Conference	5th ESA/ESTEC
Country/Territory	Netherlands
City	Noordwijk
Period	3/10/05 → 5/10/05

Keywords

nano
micro
mems

Cite this

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title = "A Nordic approach to novel micro and nanotechnology",

abstract = "An overview of microand nanotechnologies at VTT Technical Research Centre of Finland is presented. Novel research is carried out at several areas. Related to micro and nanoelectronics, an efficient way for manufacturing nanoscale components using nanopattering as well as superconductor-semiconductor-superconductor (SSmS) microcooler is presented. MEMS activities include development of a high quality 13 MHz reference oscillator and integrated CMOS and MEMS circuits for pressure sensing. Micromodules and structures based LTCC are described. At microwaves and millimetre waves, impedance tuners and matching networks for 4 to 100 GHz are depict. Summary on roll-to-roll printed electronics for making organic light emitting diodes (OLED), diffractive ROM memories and other components is given.",

keywords = "nano, micro, mems",

author = "Jussi Tuovinen and Jouni Ahopelto and Janne Aikio and Pentti Karioja and Hannu Kattelus and Terho Kololuoma and Harri Kopola and Aarne Oja and Tauno V{\"a}h{\"a}-Heikkil{\"a}",

year = "2005",

language = "English",

booktitle = "Proceedings of 5th ESA/ESTEC",

publisher = "European Space Agency (ESA)",

address = "France",

note = "5th ESA/ESTEC : Round Table on Micro/Nano Technologies for Space ; Conference date: 03-10-2005 Through 05-10-2005",

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TY - GEN

T1 - A Nordic approach to novel micro and nanotechnology

AU - Tuovinen, Jussi

AU - Ahopelto, Jouni

AU - Aikio, Janne

AU - Karioja, Pentti

AU - Kattelus, Hannu

AU - Kololuoma, Terho

AU - Kopola, Harri

AU - Oja, Aarne

AU - Vähä-Heikkilä, Tauno

PY - 2005

Y1 - 2005

N2 - An overview of microand nanotechnologies at VTT Technical Research Centre of Finland is presented. Novel research is carried out at several areas. Related to micro and nanoelectronics, an efficient way for manufacturing nanoscale components using nanopattering as well as superconductor-semiconductor-superconductor (SSmS) microcooler is presented. MEMS activities include development of a high quality 13 MHz reference oscillator and integrated CMOS and MEMS circuits for pressure sensing. Micromodules and structures based LTCC are described. At microwaves and millimetre waves, impedance tuners and matching networks for 4 to 100 GHz are depict. Summary on roll-to-roll printed electronics for making organic light emitting diodes (OLED), diffractive ROM memories and other components is given.

AB - An overview of microand nanotechnologies at VTT Technical Research Centre of Finland is presented. Novel research is carried out at several areas. Related to micro and nanoelectronics, an efficient way for manufacturing nanoscale components using nanopattering as well as superconductor-semiconductor-superconductor (SSmS) microcooler is presented. MEMS activities include development of a high quality 13 MHz reference oscillator and integrated CMOS and MEMS circuits for pressure sensing. Micromodules and structures based LTCC are described. At microwaves and millimetre waves, impedance tuners and matching networks for 4 to 100 GHz are depict. Summary on roll-to-roll printed electronics for making organic light emitting diodes (OLED), diffractive ROM memories and other components is given.

KW - nano

KW - micro

KW - mems

M3 - Conference article in proceedings

BT - Proceedings of 5th ESA/ESTEC

PB - European Space Agency (ESA)

T2 - 5th ESA/ESTEC

Y2 - 3 October 2005 through 5 October 2005

ER -

A Nordic approach to novel micro and nanotechnology

Abstract

Conference

Keywords

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