An overview of microand
nanotechnologies at VTT Technical Research Centre of
Finland is presented. Novel research is carried out at
several areas. Related to micro and nanoelectronics, an
efficient way for manufacturing nanoscale components
using nanopattering as well as
microcooler is presented. MEMS activities include
development of a high quality 13 MHz reference oscillator
and integrated CMOS and MEMS circuits for pressure
sensing. Micromodules and structures based LTCC are
described. At microwaves and millimetre waves, impedance
tuners and matching networks for 4 to 100 GHz are depict.
Summary on roll-to-roll printed electronics for making
organic light emitting diodes (OLED), diffractive ROM
memories and other components is given.
|Period||3/10/05 → 5/10/05|