A novel imprinting tool for roll to roll manufacturing of sub-micron structures

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the XL Annual Conference of the Finnish Physical Society. Tampere, 9 - 11 March 2006
PublisherTampere University of Technology
ISBN (Print)952-15-1568-6
Publication statusPublished - 2006
MoE publication typeB3 Non-refereed article in conference proceedings
EventXL Annual Conference of the Finnish Physical Society - Tampere, Finland
Duration: 9 Mar 200611 Mar 2006

Publication series

SeriesTampereen teknillinen yliopisto: Fysiikan laitos. Raportti
Number2006:1
ISSN1459-3742

Conference

ConferenceXL Annual Conference of the Finnish Physical Society
CountryFinland
CityTampere
Period9/03/0611/03/06

Cite this

Mäkelä, T., Haatainen, T., Majander, P., & Ahopelto, J. (2006). A novel imprinting tool for roll to roll manufacturing of sub-micron structures. In Proceedings of the XL Annual Conference of the Finnish Physical Society. Tampere, 9 - 11 March 2006 [184] Tampere University of Technology. Tampereen teknillinen yliopisto: Fysiikan laitos. Raportti, No. 2006:1