@inproceedings{aef464d2517240fca02941b8651e895d,
title = "A novel MEMS gas sensor based on ultrasonic resonance cavity",
abstract = "We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10-20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.",
author = "Koppinen, {Panu J.} and Teuvo Sillanp{\"a}{\"a} and Anu K{\"a}rkk{\"a}inen and Jaakko Saarilahti and Heikki Sepp{\"a}",
year = "2014",
month = jan,
day = "1",
doi = "10.1109/ULTSYM.2014.0161",
language = "English",
series = "Proceedings - IEEE Ultrasonics Symposium",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
pages = "655--658",
booktitle = "IEEE International Ultrasonics Symposium, IUS",
address = "United States",
note = "IEEE International Ultrasonics Symposium, IUS 2014 ; Conference date: 03-09-2014 Through 06-09-2014",
}