A novel MEMS gas sensor based on ultrasonic resonance cavity

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10 - 20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.

    Original languageEnglish
    Title of host publicationIEEE International Ultrasonics Symposium, IUS
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages655-658
    Number of pages4
    ISBN (Electronic)978-1-4799-7049-0
    DOIs
    Publication statusPublished - 1 Jan 2014
    MoE publication typeA4 Article in a conference publication
    EventIEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
    Duration: 3 Sep 20146 Sep 2014

    Conference

    ConferenceIEEE International Ultrasonics Symposium, IUS 2014
    CountryUnited States
    CityChicago
    Period3/09/146/09/14

    Fingerprint

    microelectromechanical systems
    ultrasonics
    cavities
    sensors
    gases
    humidity
    acoustic resonance
    carbon dioxide
    low concentrations
    transducers
    methane

    Cite this

    Koppinen, P. J., Sillanpää, T., Kärkkäinen, A., Saarilahti, J., & Seppä, H. (2014). A novel MEMS gas sensor based on ultrasonic resonance cavity. In IEEE International Ultrasonics Symposium, IUS (pp. 655-658). [6931795] IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ULTSYM.2014.0161
    Koppinen, P. J. ; Sillanpää, T. ; Kärkkäinen, A. ; Saarilahti, J. ; Seppä, H. / A novel MEMS gas sensor based on ultrasonic resonance cavity. IEEE International Ultrasonics Symposium, IUS. IEEE Institute of Electrical and Electronic Engineers , 2014. pp. 655-658
    @inproceedings{aef464d2517240fca02941b8651e895d,
    title = "A novel MEMS gas sensor based on ultrasonic resonance cavity",
    abstract = "We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10 - 20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.",
    author = "Koppinen, {P. J.} and T. Sillanp{\"a}{\"a} and A. K{\"a}rkk{\"a}inen and J. Saarilahti and H. Sepp{\"a}",
    year = "2014",
    month = "1",
    day = "1",
    doi = "10.1109/ULTSYM.2014.0161",
    language = "English",
    pages = "655--658",
    booktitle = "IEEE International Ultrasonics Symposium, IUS",
    publisher = "IEEE Institute of Electrical and Electronic Engineers",
    address = "United States",

    }

    Koppinen, PJ, Sillanpää, T, Kärkkäinen, A, Saarilahti, J & Seppä, H 2014, A novel MEMS gas sensor based on ultrasonic resonance cavity. in IEEE International Ultrasonics Symposium, IUS., 6931795, IEEE Institute of Electrical and Electronic Engineers , pp. 655-658, IEEE International Ultrasonics Symposium, IUS 2014, Chicago, United States, 3/09/14. https://doi.org/10.1109/ULTSYM.2014.0161

    A novel MEMS gas sensor based on ultrasonic resonance cavity. / Koppinen, P. J.; Sillanpää, T.; Kärkkäinen, A.; Saarilahti, J.; Seppä, H.

    IEEE International Ultrasonics Symposium, IUS. IEEE Institute of Electrical and Electronic Engineers , 2014. p. 655-658 6931795.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - A novel MEMS gas sensor based on ultrasonic resonance cavity

    AU - Koppinen, P. J.

    AU - Sillanpää, T.

    AU - Kärkkäinen, A.

    AU - Saarilahti, J.

    AU - Seppä, H.

    PY - 2014/1/1

    Y1 - 2014/1/1

    N2 - We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10 - 20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.

    AB - We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10 - 20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.

    UR - http://www.scopus.com/inward/record.url?scp=84910037321&partnerID=8YFLogxK

    U2 - 10.1109/ULTSYM.2014.0161

    DO - 10.1109/ULTSYM.2014.0161

    M3 - Conference article in proceedings

    AN - SCOPUS:84910037321

    SP - 655

    EP - 658

    BT - IEEE International Ultrasonics Symposium, IUS

    PB - IEEE Institute of Electrical and Electronic Engineers

    ER -

    Koppinen PJ, Sillanpää T, Kärkkäinen A, Saarilahti J, Seppä H. A novel MEMS gas sensor based on ultrasonic resonance cavity. In IEEE International Ultrasonics Symposium, IUS. IEEE Institute of Electrical and Electronic Engineers . 2014. p. 655-658. 6931795 https://doi.org/10.1109/ULTSYM.2014.0161