A novel MEMS gas sensor based on ultrasonic resonance cavity

Panu J. Koppinen, Teuvo Sillanpää, Anu Kärkkäinen, Jaakko Saarilahti, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)


    We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10-20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.

    Original languageEnglish
    Title of host publicationIEEE International Ultrasonics Symposium, IUS
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)978-1-4799-7049-0, 978-1-4799-7048-3
    Publication statusPublished - 1 Jan 2014
    MoE publication typeA4 Article in a conference publication
    EventIEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
    Duration: 3 Sept 20146 Sept 2014

    Publication series

    SeriesProceedings - IEEE Ultrasonics Symposium


    ConferenceIEEE International Ultrasonics Symposium, IUS 2014
    Country/TerritoryUnited States


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