A novel MEMS gas sensor based on ultrasonic resonance cavity

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10 - 20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.

Original languageEnglish
Title of host publicationIEEE International Ultrasonics Symposium, IUS
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages655-658
Number of pages4
ISBN (Electronic)978-1-4799-7049-0
DOIs
Publication statusPublished - 1 Jan 2014
MoE publication typeA4 Article in a conference publication
EventIEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
Duration: 3 Sep 20146 Sep 2014

Conference

ConferenceIEEE International Ultrasonics Symposium, IUS 2014
CountryUnited States
CityChicago
Period3/09/146/09/14

Fingerprint

microelectromechanical systems
ultrasonics
cavities
sensors
gases
humidity
acoustic resonance
carbon dioxide
low concentrations
transducers
methane

Cite this

Koppinen, P. J., Sillanpää, T., Kärkkäinen, A., Saarilahti, J., & Seppä, H. (2014). A novel MEMS gas sensor based on ultrasonic resonance cavity. In IEEE International Ultrasonics Symposium, IUS (pp. 655-658). [6931795] Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/ULTSYM.2014.0161
Koppinen, P. J. ; Sillanpää, T. ; Kärkkäinen, A. ; Saarilahti, J. ; Seppä, H. / A novel MEMS gas sensor based on ultrasonic resonance cavity. IEEE International Ultrasonics Symposium, IUS. Institute of Electrical and Electronic Engineers IEEE, 2014. pp. 655-658
@inproceedings{aef464d2517240fca02941b8651e895d,
title = "A novel MEMS gas sensor based on ultrasonic resonance cavity",
abstract = "We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10 - 20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.",
author = "Koppinen, {P. J.} and T. Sillanp{\"a}{\"a} and A. K{\"a}rkk{\"a}inen and J. Saarilahti and H. Sepp{\"a}",
year = "2014",
month = "1",
day = "1",
doi = "10.1109/ULTSYM.2014.0161",
language = "English",
pages = "655--658",
booktitle = "IEEE International Ultrasonics Symposium, IUS",
publisher = "Institute of Electrical and Electronic Engineers IEEE",
address = "United States",

}

Koppinen, PJ, Sillanpää, T, Kärkkäinen, A, Saarilahti, J & Seppä, H 2014, A novel MEMS gas sensor based on ultrasonic resonance cavity. in IEEE International Ultrasonics Symposium, IUS., 6931795, Institute of Electrical and Electronic Engineers IEEE, pp. 655-658, IEEE International Ultrasonics Symposium, IUS 2014, Chicago, United States, 3/09/14. https://doi.org/10.1109/ULTSYM.2014.0161

A novel MEMS gas sensor based on ultrasonic resonance cavity. / Koppinen, P. J.; Sillanpää, T.; Kärkkäinen, A.; Saarilahti, J.; Seppä, H.

IEEE International Ultrasonics Symposium, IUS. Institute of Electrical and Electronic Engineers IEEE, 2014. p. 655-658 6931795.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - A novel MEMS gas sensor based on ultrasonic resonance cavity

AU - Koppinen, P. J.

AU - Sillanpää, T.

AU - Kärkkäinen, A.

AU - Saarilahti, J.

AU - Seppä, H.

PY - 2014/1/1

Y1 - 2014/1/1

N2 - We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10 - 20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.

AB - We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO2 and methane CH4, the lowest resolvable concentrations are about 10 - 20 ppm - a competitive result with the existing commercially available CO2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.

UR - http://www.scopus.com/inward/record.url?scp=84910037321&partnerID=8YFLogxK

U2 - 10.1109/ULTSYM.2014.0161

DO - 10.1109/ULTSYM.2014.0161

M3 - Conference article in proceedings

SP - 655

EP - 658

BT - IEEE International Ultrasonics Symposium, IUS

PB - Institute of Electrical and Electronic Engineers IEEE

ER -

Koppinen PJ, Sillanpää T, Kärkkäinen A, Saarilahti J, Seppä H. A novel MEMS gas sensor based on ultrasonic resonance cavity. In IEEE International Ultrasonics Symposium, IUS. Institute of Electrical and Electronic Engineers IEEE. 2014. p. 655-658. 6931795 https://doi.org/10.1109/ULTSYM.2014.0161