A novel MEMS gas sensor based on ultrasonic resonance cavity

Panu J. Koppinen, Teuvo Sillanpää, Anu Kärkkäinen, Jaakko Saarilahti, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    Physics

    Chemistry