A novel MEMS gas sensor based on ultrasonic resonance cavity

Panu J. Koppinen, Teuvo Sillanpää, Anu Kärkkäinen, Jaakko Saarilahti, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    1 Citation (Scopus)

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