A novel method for processing capacitive micromechanical ultrasonic transducers (cMUT)

Jaakko Saarilahti; Martti Blomberg; Ari Häärä; Hannu Kattelus

doi:10.1109/ULTSYM.2002.1192480

A novel method for processing capacitive micromechanical ultrasonic transducers (cMUT)

Jaakko Saarilahti
, Martti Blomberg
, Ari Häärä
, Hannu Kattelus

VTT (former employee or external)

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

11 Citations (Scopus)

Abstract

The cMUTs presented in this study are based on a new surface micromachining process, where part of the top electrode of the cMUT is fabricated of porous polysilicon. This method gives many advantages over the previously reported fabrication processes.

Original language	English
Title of host publication	2002 IEEE Ultrasonics Symposium Proceedings
Editors	Donald E. Yuhas, Susan C. Schneider
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	1071-1074
Volume	2
ISBN (Electronic)	0-7803-7583-1
ISBN (Print)	978-0-7803-7582-6
DOIs	https://doi.org/10.1109/ULTSYM.2002.1192480
Publication status	Published - 2002
MoE publication type	A4 Article in a conference publication
Event	2002 IEEE International Ultrasonics Symposium and Short Courses - Munich, Germany Duration: 8 Oct 2002 → 11 Oct 2002

Publication series

Series	Proceedings - IEEE Ultrasonics Symposium
Volume	2002
ISSN	1051-0117

Conference

Conference	2002 IEEE International Ultrasonics Symposium and Short Courses
Country/Territory	Germany
City	Munich
Period	8/10/02 → 11/10/02

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Ultrasonics
Micromechanics
cMUT

Access to Document

10.1109/ULTSYM.2002.1192480

Cite this

Saarilahti, Jaakko ; Blomberg, Martti ; Häärä, Ari et al. / A novel method for processing capacitive micromechanical ultrasonic transducers (cMUT). 2002 IEEE Ultrasonics Symposium Proceedings. editor / Donald E. Yuhas ; Susan C. Schneider. Vol. 2 IEEE Institute of Electrical and Electronic Engineers, 2002. pp. 1071-1074 (Proceedings - IEEE Ultrasonics Symposium, Vol. 2002).

@inproceedings{c6b2ca15575b4a62b6bbc63d5c348b80,

title = "A novel method for processing capacitive micromechanical ultrasonic transducers (cMUT)",

abstract = "The cMUTs presented in this study are based on a new surface micromachining process, where part of the top electrode of the cMUT is fabricated of porous polysilicon. This method gives many advantages over the previously reported fabrication processes.",

keywords = "Ultrasonics, Micromechanics, cMUT",

author = "Jaakko Saarilahti and Martti Blomberg and Ari H{\"a}{\"a}r{\"a} and Hannu Kattelus",

note = "Project code: T2SU00196; 2002 IEEE International Ultrasonics Symposium and Short Courses ; Conference date: 08-10-2002 Through 11-10-2002",

year = "2002",

doi = "10.1109/ULTSYM.2002.1192480",

language = "English",

isbn = "978-0-7803-7582-6",

volume = "2",

series = "Proceedings - IEEE Ultrasonics Symposium",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

pages = "1071--1074",

editor = "Yuhas, \{Donald E.\} and Schneider, \{Susan C.\}",

booktitle = "2002 IEEE Ultrasonics Symposium Proceedings",

address = "United States",

}

Saarilahti, J, Blomberg, M, Häärä, A & Kattelus, H 2002, A novel method for processing capacitive micromechanical ultrasonic transducers (cMUT). in DE Yuhas & SC Schneider (eds), 2002 IEEE Ultrasonics Symposium Proceedings. vol. 2, IEEE Institute of Electrical and Electronic Engineers, Proceedings - IEEE Ultrasonics Symposium, vol. 2002, pp. 1071-1074, 2002 IEEE International Ultrasonics Symposium and Short Courses, Munich, Germany, 8/10/02. https://doi.org/10.1109/ULTSYM.2002.1192480

A novel method for processing capacitive micromechanical ultrasonic transducers (cMUT). / Saarilahti, Jaakko; Blomberg, Martti; Häärä, Ari et al.
2002 IEEE Ultrasonics Symposium Proceedings. ed. / Donald E. Yuhas; Susan C. Schneider. Vol. 2 IEEE Institute of Electrical and Electronic Engineers, 2002. p. 1071-1074 (Proceedings - IEEE Ultrasonics Symposium, Vol. 2002).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - A novel method for processing capacitive micromechanical ultrasonic transducers (cMUT)

AU - Saarilahti, Jaakko

AU - Blomberg, Martti

AU - Häärä, Ari

AU - Kattelus, Hannu

N1 - Project code: T2SU00196

PY - 2002

Y1 - 2002

N2 - The cMUTs presented in this study are based on a new surface micromachining process, where part of the top electrode of the cMUT is fabricated of porous polysilicon. This method gives many advantages over the previously reported fabrication processes.

AB - The cMUTs presented in this study are based on a new surface micromachining process, where part of the top electrode of the cMUT is fabricated of porous polysilicon. This method gives many advantages over the previously reported fabrication processes.

KW - Ultrasonics

KW - Micromechanics

KW - cMUT

U2 - 10.1109/ULTSYM.2002.1192480

DO - 10.1109/ULTSYM.2002.1192480

M3 - Conference article in proceedings

SN - 978-0-7803-7582-6

VL - 2

T3 - Proceedings - IEEE Ultrasonics Symposium

SP - 1071

EP - 1074

BT - 2002 IEEE Ultrasonics Symposium Proceedings

A2 - Yuhas, Donald E.

A2 - Schneider, Susan C.

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 2002 IEEE International Ultrasonics Symposium and Short Courses

Y2 - 8 October 2002 through 11 October 2002

ER -

Saarilahti J, Blomberg M, Häärä A, Kattelus H. A novel method for processing capacitive micromechanical ultrasonic transducers (cMUT). In Yuhas DE, Schneider SC, editors, 2002 IEEE Ultrasonics Symposium Proceedings. Vol. 2. IEEE Institute of Electrical and Electronic Engineers. 2002. p. 1071-1074. (Proceedings - IEEE Ultrasonics Symposium, Vol. 2002). doi: 10.1109/ULTSYM.2002.1192480

A novel method for processing capacitive micromechanical ultrasonic transducers (cMUT)

Abstract

Publication series

Conference

UN SDGs

Keywords

Access to Document

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Cite this