A novel method for processing capacitive micromechanical ultrasonic transducers (cMUT)

Jaakko Saarilahti, Martti Blomberg, Ari Häärä, Hannu Kattelus

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    10 Citations (Scopus)

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    Engineering

    Material Science

    Chemical Engineering