A Reconfigurable 6-20 GHz RF MEMS impedance tuner

Tauno Vähä-Heikkilä, Jussi Varis, Jussi Tuovinen, G.M. Rebeiz

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

39 Citations (Scopus)

Abstract

A 6-20 GHz reconfigurable triple-stub impedance tuner has been developed. It is based on a 11-switched MEMS capacitor network producing 2/sup 11/ different impedances. The measured and simulated impedance coverage is the widest ever measured to-date from any RF MEMS tuner. This network is most suitable for noise parameters and load-pull measurements of transistors at 6-20 GHz.
Original languageEnglish
Title of host publication2004 IEEE MTT-S International Microwave Symposium Digest
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages729-732
ISBN (Print)0-7803-8331-1
DOIs
Publication statusPublished - 2004
MoE publication typeA4 Article in a conference publication
EventIEEE MTT-S International Microwave Symposium and Microwave Week 2004 - Forth Worth, United States
Duration: 6 Jun 200411 Jun 2004

Publication series

SeriesIEEE MTT-S International Microwave Symposium Digest
Volume2004
ISSN0149-645X

Conference

ConferenceIEEE MTT-S International Microwave Symposium and Microwave Week 2004
CountryUnited States
CityForth Worth
Period6/06/0411/06/04

Keywords

  • RF MEMS
  • matching network
  • impedance tuner
  • noise parameter
  • load pull
  • phased array

Fingerprint Dive into the research topics of 'A Reconfigurable 6-20 GHz RF MEMS impedance tuner'. Together they form a unique fingerprint.

  • Cite this

    Vähä-Heikkilä, T., Varis, J., Tuovinen, J., & Rebeiz, G. M. (2004). A Reconfigurable 6-20 GHz RF MEMS impedance tuner. In 2004 IEEE MTT-S International Microwave Symposium Digest (pp. 729-732). IEEE Institute of Electrical and Electronic Engineers. IEEE MTT-S International Microwave Symposium Digest, Vol.. 2004 https://doi.org/10.1109/MWSYM.2004.1339062