A Reconfigurable 6-20 GHz RF MEMS impedance tuner

Tauno Vähä-Heikkilä, Jussi Varis, Jussi Tuovinen, G.M. Rebeiz

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    42 Citations (Scopus)


    A 6-20 GHz reconfigurable triple-stub impedance tuner has been developed. It is based on a 11-switched MEMS capacitor network producing 2/sup 11/ different impedances. The measured and simulated impedance coverage is the widest ever measured to-date from any RF MEMS tuner. This network is most suitable for noise parameters and load-pull measurements of transistors at 6-20 GHz.
    Original languageEnglish
    Title of host publication2004 IEEE MTT-S International Microwave Symposium Digest
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Print)978-0-7803-8331-9
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication
    EventIEEE MTT-S International Microwave Symposium and Microwave Week 2004 - Forth Worth, United States
    Duration: 6 Jun 200411 Jun 2004

    Publication series

    SeriesIEEE MTT-S International Microwave Symposium


    ConferenceIEEE MTT-S International Microwave Symposium and Microwave Week 2004
    Country/TerritoryUnited States
    CityForth Worth


    • RF MEMS
    • matching network
    • impedance tuner
    • noise parameter
    • load pull
    • phased array


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