A secondary-ion-mass-spectrometry study of low-energy ion-beam mixing of Au-Pt interfaces

Jari Likonen, Mikko Hautala, Ilkka Koponen

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)

Abstract

Pt‐Au multilayers deposited on a Si substrate were profiled with 2.5, 5, and 8 keV Ar+ ions in order to gain information on the influence of atomic mixing on secondary‐ion‐mass‐spectrometry depth resolution. Collisional mixing and thermal spike mixing of metallic interfaces have been calculated with no adjustable parameters. The collisional mixing is calculated by Monte Carlo simulation and the thermal spike model based on well‐established solid‐state models is used to describe the late phase of the cascade. Experimentally observed broadening of the Au/Pt and Pt/Au interfaces as a function of primary‐ion energy is predicted by the model. The experimental and calculated decay lengths of the trailing edge in Au are greater than in Pt by a factor of 2–3. This difference in interface broadening in Pt compared to that in Au is due to more efficient electron‐phonon coupling and thus more rapid quenching of thermal spikes in Pt than in Au.
Original languageEnglish
Pages (from-to)5898-5904
Number of pages7
JournalJournal of Applied Physics
Volume72
Issue number12
DOIs
Publication statusPublished - 1992
MoE publication typeA1 Journal article-refereed

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secondary ion mass spectrometry
ion beams
spikes
energy
trailing edges
cascades
decay
ions
simulation

Cite this

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title = "A secondary-ion-mass-spectrometry study of low-energy ion-beam mixing of Au-Pt interfaces",
abstract = "Pt‐Au multilayers deposited on a Si substrate were profiled with 2.5, 5, and 8 keV Ar+ ions in order to gain information on the influence of atomic mixing on secondary‐ion‐mass‐spectrometry depth resolution. Collisional mixing and thermal spike mixing of metallic interfaces have been calculated with no adjustable parameters. The collisional mixing is calculated by Monte Carlo simulation and the thermal spike model based on well‐established solid‐state models is used to describe the late phase of the cascade. Experimentally observed broadening of the Au/Pt and Pt/Au interfaces as a function of primary‐ion energy is predicted by the model. The experimental and calculated decay lengths of the trailing edge in Au are greater than in Pt by a factor of 2–3. This difference in interface broadening in Pt compared to that in Au is due to more efficient electron‐phonon coupling and thus more rapid quenching of thermal spikes in Pt than in Au.",
author = "Jari Likonen and Mikko Hautala and Ilkka Koponen",
year = "1992",
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language = "English",
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}

A secondary-ion-mass-spectrometry study of low-energy ion-beam mixing of Au-Pt interfaces. / Likonen, Jari; Hautala, Mikko; Koponen, Ilkka.

In: Journal of Applied Physics, Vol. 72, No. 12, 1992, p. 5898-5904.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - A secondary-ion-mass-spectrometry study of low-energy ion-beam mixing of Au-Pt interfaces

AU - Likonen, Jari

AU - Hautala, Mikko

AU - Koponen, Ilkka

PY - 1992

Y1 - 1992

N2 - Pt‐Au multilayers deposited on a Si substrate were profiled with 2.5, 5, and 8 keV Ar+ ions in order to gain information on the influence of atomic mixing on secondary‐ion‐mass‐spectrometry depth resolution. Collisional mixing and thermal spike mixing of metallic interfaces have been calculated with no adjustable parameters. The collisional mixing is calculated by Monte Carlo simulation and the thermal spike model based on well‐established solid‐state models is used to describe the late phase of the cascade. Experimentally observed broadening of the Au/Pt and Pt/Au interfaces as a function of primary‐ion energy is predicted by the model. The experimental and calculated decay lengths of the trailing edge in Au are greater than in Pt by a factor of 2–3. This difference in interface broadening in Pt compared to that in Au is due to more efficient electron‐phonon coupling and thus more rapid quenching of thermal spikes in Pt than in Au.

AB - Pt‐Au multilayers deposited on a Si substrate were profiled with 2.5, 5, and 8 keV Ar+ ions in order to gain information on the influence of atomic mixing on secondary‐ion‐mass‐spectrometry depth resolution. Collisional mixing and thermal spike mixing of metallic interfaces have been calculated with no adjustable parameters. The collisional mixing is calculated by Monte Carlo simulation and the thermal spike model based on well‐established solid‐state models is used to describe the late phase of the cascade. Experimentally observed broadening of the Au/Pt and Pt/Au interfaces as a function of primary‐ion energy is predicted by the model. The experimental and calculated decay lengths of the trailing edge in Au are greater than in Pt by a factor of 2–3. This difference in interface broadening in Pt compared to that in Au is due to more efficient electron‐phonon coupling and thus more rapid quenching of thermal spikes in Pt than in Au.

U2 - 10.1063/1.351897

DO - 10.1063/1.351897

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VL - 72

SP - 5898

EP - 5904

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

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