A self-aligned CoSi scheme for 1.5 m CMOS technology

Gyözö Drozdy, Hannu Ronkainen, Markku Orpana, Ilkka Suni

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Pages49-52
    Publication statusPublished - 1988
    MoE publication typeNot Eligible
    Event13th Nordic Semiconductor Meeting - Saltsjöbaden, Stockholm, Sweden
    Duration: 5 Jun 19888 Jun 1988

    Seminar

    Seminar13th Nordic Semiconductor Meeting
    CountrySweden
    CityStockholm
    Period5/06/888/06/88

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