A self-aligned CoSi scheme for 1.5 m CMOS technology

Gyözö Drozdy, Hannu Ronkainen, Markku Orpana, Ilkka Suni

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Pages49-52
    Publication statusPublished - 1988
    MoE publication typeNot Eligible
    Event13th Nordic Semiconductor Meeting - Saltsjöbaden, Stockholm, Sweden
    Duration: 5 Jun 19888 Jun 1988

    Seminar

    Seminar13th Nordic Semiconductor Meeting
    CountrySweden
    CityStockholm
    Period5/06/888/06/88

    Cite this

    Drozdy, G., Ronkainen, H., Orpana, M., & Suni, I. (1988). A self-aligned CoSi scheme for 1.5 m CMOS technology. 49-52. Paper presented at 13th Nordic Semiconductor Meeting, Stockholm, Sweden.