Abstract
The author thanks Tuomo Suntola for sharing these and
other details of the development of ALE and EL. It has
been a great honor and privilege to work with him and to
write this history. Writing this history was triggered by
the parallel-running worldwide Virtual Project on the
History of ALD (VPHA). Warmest thanks to Tuomo Suntola
for his support for the VPHA, too. The author also
acknowledges Tapio Alvesalo for checking the details
related to NAPS, Dr. Marko Tuominen for the details
related to ASM Microchemistry, Juhana Kostamo for the
details related to Picosun, Prof. Victor Drozd for
confirming the timing of Suntola's visit to Leningrad,
Prof. Yukihiro Shimogaki and Prof. Markku Leskelä for
identifying the second-left participant in the ALE-1
photograph, and Prof. David Cameron for polishing the
language in this article. Funding by the Academy of
Finland's Centre of Excellence in Atomic Layer Deposition
(ALDCoE) is gratefully acknowledged.
| Original language | English |
|---|---|
| Pages (from-to) | 332-344 |
| Journal | Chemical Vapor Deposition |
| Volume | 20 |
| Issue number | 10-11-12 |
| DOIs | |
| Publication status | Published - 2014 |
| MoE publication type | A1 Journal article-refereed |
