A short history of atomic layer deposition: Tuomo Suntola's atomic layer epitaxy

Riikka Puurunen

Research output: Contribution to journalArticleScientificpeer-review

67 Citations (Scopus)

Abstract

The author thanks Tuomo Suntola for sharing these and other details of the development of ALE and EL. It has been a great honor and privilege to work with him and to write this history. Writing this history was triggered by the parallel-running worldwide Virtual Project on the History of ALD (VPHA). Warmest thanks to Tuomo Suntola for his support for the VPHA, too. The author also acknowledges Tapio Alvesalo for checking the details related to NAPS, Dr. Marko Tuominen for the details related to ASM Microchemistry, Juhana Kostamo for the details related to Picosun, Prof. Victor Drozd for confirming the timing of Suntola's visit to Leningrad, Prof. Yukihiro Shimogaki and Prof. Markku Leskelä for identifying the second-left participant in the ALE-1 photograph, and Prof. David Cameron for polishing the language in this article. Funding by the Academy of Finland's Centre of Excellence in Atomic Layer Deposition (ALDCoE) is gratefully acknowledged.
Original languageEnglish
Pages (from-to)332-344
JournalChemical Vapor Deposition
Volume20
Issue number10-11-12
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

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Atomic layer epitaxy
Atomic layer deposition
atomic layer epitaxy
Polishing
histories
Finland
photographs
polishing
time measurement
N-(4-aminophenethyl)spiroperidol

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title = "A short history of atomic layer deposition: Tuomo Suntola's atomic layer epitaxy",
abstract = "The author thanks Tuomo Suntola for sharing these and other details of the development of ALE and EL. It has been a great honor and privilege to work with him and to write this history. Writing this history was triggered by the parallel-running worldwide Virtual Project on the History of ALD (VPHA). Warmest thanks to Tuomo Suntola for his support for the VPHA, too. The author also acknowledges Tapio Alvesalo for checking the details related to NAPS, Dr. Marko Tuominen for the details related to ASM Microchemistry, Juhana Kostamo for the details related to Picosun, Prof. Victor Drozd for confirming the timing of Suntola's visit to Leningrad, Prof. Yukihiro Shimogaki and Prof. Markku Leskel{\"a} for identifying the second-left participant in the ALE-1 photograph, and Prof. David Cameron for polishing the language in this article. Funding by the Academy of Finland's Centre of Excellence in Atomic Layer Deposition (ALDCoE) is gratefully acknowledged.",
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A short history of atomic layer deposition : Tuomo Suntola's atomic layer epitaxy. / Puurunen, Riikka.

In: Chemical Vapor Deposition, Vol. 20, No. 10-11-12, 2014, p. 332-344.

Research output: Contribution to journalArticleScientificpeer-review

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AB - The author thanks Tuomo Suntola for sharing these and other details of the development of ALE and EL. It has been a great honor and privilege to work with him and to write this history. Writing this history was triggered by the parallel-running worldwide Virtual Project on the History of ALD (VPHA). Warmest thanks to Tuomo Suntola for his support for the VPHA, too. The author also acknowledges Tapio Alvesalo for checking the details related to NAPS, Dr. Marko Tuominen for the details related to ASM Microchemistry, Juhana Kostamo for the details related to Picosun, Prof. Victor Drozd for confirming the timing of Suntola's visit to Leningrad, Prof. Yukihiro Shimogaki and Prof. Markku Leskelä for identifying the second-left participant in the ALE-1 photograph, and Prof. David Cameron for polishing the language in this article. Funding by the Academy of Finland's Centre of Excellence in Atomic Layer Deposition (ALDCoE) is gratefully acknowledged.

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