A silicon microsystem-miniaturised infrared spectrometer

Martti Blomberg, Outi Rusanen, Kimmo Keränen, Ari Lehto

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    27 Citations (Scopus)


    A miniaturised multipurpose infrared analyser has been developed. This comprises an electrically modulatable infra-red source, an electrically tunable Fabry-Perot pass band filter, an integrated circuit and a photodetector, all silicon microfabricated and assembled on the same silicon substrate. The infrared source and the detector are monolithically integrated in the substrate. The Fabry-Perot interferometer is flip-chip bonded and the IC-circuit wire-bonded. The whole spectrometer assembly is in a DIL package, having holes for the incoming and outgoing radiation. The dimensions of the spectrometer silicon substrate are 5×15 mm².
    Original languageEnglish
    Title of host publicationProceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
    Place of PublicationPiscataway
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)0-7803-3831-6
    ISBN (Print)0-7803-3829-4
    Publication statusPublished - 1997
    MoE publication typeA4 Article in a conference publication
    EventInternational Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, United States
    Duration: 16 Jun 199719 Jun 1997


    ConferenceInternational Solid State Sensors and Actuators Conference (Transducers '97)
    Country/TerritoryUnited States


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