A silicon microsystem-miniaturised infrared spectrometer

Martti Blomberg, Outi Rusanen, Kimmo Keränen, Ari Lehto

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

26 Citations (Scopus)


A miniaturised multipurpose infrared analyser has been developed. This comprises an electrically modulatable infra-red source, an electrically tunable Fabry-Perot pass band filter, an integrated circuit and a photodetector, all silicon microfabricated and assembled on the same silicon substrate. The infrared source and the detector are monolithically integrated in the substrate. The Fabry-Perot interferometer is flip-chip bonded and the IC-circuit wire-bonded. The whole spectrometer assembly is in a DIL package, having holes for the incoming and outgoing radiation. The dimensions of the spectrometer silicon substrate are 5×15 mm².
Original languageEnglish
Title of host publicationProceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Place of PublicationPiscataway
PublisherIEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)0-7803-3831-6
ISBN (Print)0-7803-3829-4
Publication statusPublished - 1997
MoE publication typeA4 Article in a conference publication
EventInternational Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, United States
Duration: 16 Jun 199719 Jun 1997


ConferenceInternational Solid State Sensors and Actuators Conference (Transducers '97)
CountryUnited States

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