A silicon microsystem-miniaturised infrared spectrometer

Martti Blomberg, Outi Rusanen, Kimmo Keränen, Ari Lehto

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

26 Citations (Scopus)

Abstract

A miniaturised multipurpose infrared analyser has been developed. This comprises an electrically modulatable infra-red source, an electrically tunable Fabry-Perot pass band filter, an integrated circuit and a photodetector, all silicon microfabricated and assembled on the same silicon substrate. The infrared source and the detector are monolithically integrated in the substrate. The Fabry-Perot interferometer is flip-chip bonded and the IC-circuit wire-bonded. The whole spectrometer assembly is in a DIL package, having holes for the incoming and outgoing radiation. The dimensions of the spectrometer silicon substrate are 5×15 mm².
Original languageEnglish
Title of host publicationProceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Place of PublicationPiscataway
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages1257-1258
ISBN (Electronic)0-7803-3831-6
ISBN (Print)0-7803-3829-4
DOIs
Publication statusPublished - 1997
MoE publication typeA4 Article in a conference publication
EventInternational Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, United States
Duration: 16 Jun 199719 Jun 1997

Conference

ConferenceInternational Solid State Sensors and Actuators Conference (Transducers '97)
CountryUnited States
CityChicago
Period16/06/9719/06/97

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  • Cite this

    Blomberg, M., Rusanen, O., Keränen, K., & Lehto, A. (1997). A silicon microsystem-miniaturised infrared spectrometer. In Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (pp. 1257-1258). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/SENSOR.1997.635463