A silicon microsystem-miniaturised infrared spectrometer

Martti Blomberg; Outi Rusanen; Kimmo Keränen; Ari Lehto

doi:10.1109/SENSOR.1997.635463

A silicon microsystem-miniaturised infrared spectrometer

Martti Blomberg
, Outi Rusanen
, Kimmo Keränen
, Ari Lehto

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

27 Citations (Scopus)

Abstract

A miniaturised multipurpose infrared analyser has been developed. This comprises an electrically modulatable infra-red source, an electrically tunable Fabry-Perot pass band filter, an integrated circuit and a photodetector, all silicon microfabricated and assembled on the same silicon substrate. The infrared source and the detector are monolithically integrated in the substrate. The Fabry-Perot interferometer is flip-chip bonded and the IC-circuit wire-bonded. The whole spectrometer assembly is in a DIL package, having holes for the incoming and outgoing radiation. The dimensions of the spectrometer silicon substrate are 5×15 mm².

Original language	English
Title of host publication	Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Place of Publication	Piscataway
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	1257-1258
ISBN (Electronic)	0-7803-3831-6
ISBN (Print)	0-7803-3829-4
DOIs	https://doi.org/10.1109/SENSOR.1997.635463
Publication status	Published - 1997
MoE publication type	A4 Article in a conference publication
Event	International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, United States Duration: 16 Jun 1997 → 19 Jun 1997

Conference

Conference	International Solid State Sensors and Actuators Conference (Transducers '97)
Country/Territory	United States
City	Chicago
Period	16/06/97 → 19/06/97

Access to Document

10.1109/SENSOR.1997.635463

Cite this

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title = "A silicon microsystem-miniaturised infrared spectrometer",

abstract = "A miniaturised multipurpose infrared analyser has been developed. This comprises an electrically modulatable infra-red source, an electrically tunable Fabry-Perot pass band filter, an integrated circuit and a photodetector, all silicon microfabricated and assembled on the same silicon substrate. The infrared source and the detector are monolithically integrated in the substrate. The Fabry-Perot interferometer is flip-chip bonded and the IC-circuit wire-bonded. The whole spectrometer assembly is in a DIL package, having holes for the incoming and outgoing radiation. The dimensions of the spectrometer silicon substrate are 5×15 mm².",

author = "Martti Blomberg and Outi Rusanen and Kimmo Ker{\"a}nen and Ari Lehto",

year = "1997",

doi = "10.1109/SENSOR.1997.635463",

language = "English",

isbn = "0-7803-3829-4",

pages = "1257--1258",

booktitle = "Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "International Solid State Sensors and Actuators Conference (Transducers '97) ; Conference date: 16-06-1997 Through 19-06-1997",

}

Blomberg, M, Rusanen, O, Keränen, K & Lehto, A 1997, A silicon microsystem-miniaturised infrared spectrometer. in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). IEEE Institute of Electrical and Electronic Engineers, Piscataway, pp. 1257-1258, International Solid State Sensors and Actuators Conference (Transducers '97), Chicago, Illinois, United States, 16/06/97. https://doi.org/10.1109/SENSOR.1997.635463

A silicon microsystem-miniaturised infrared spectrometer. / Blomberg, Martti; Rusanen, Outi; Keränen, Kimmo et al.
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). Piscataway: IEEE Institute of Electrical and Electronic Engineers, 1997. p. 1257-1258.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - A silicon microsystem-miniaturised infrared spectrometer

AU - Blomberg, Martti

AU - Rusanen, Outi

AU - Keränen, Kimmo

AU - Lehto, Ari

PY - 1997

Y1 - 1997

N2 - A miniaturised multipurpose infrared analyser has been developed. This comprises an electrically modulatable infra-red source, an electrically tunable Fabry-Perot pass band filter, an integrated circuit and a photodetector, all silicon microfabricated and assembled on the same silicon substrate. The infrared source and the detector are monolithically integrated in the substrate. The Fabry-Perot interferometer is flip-chip bonded and the IC-circuit wire-bonded. The whole spectrometer assembly is in a DIL package, having holes for the incoming and outgoing radiation. The dimensions of the spectrometer silicon substrate are 5×15 mm².

AB - A miniaturised multipurpose infrared analyser has been developed. This comprises an electrically modulatable infra-red source, an electrically tunable Fabry-Perot pass band filter, an integrated circuit and a photodetector, all silicon microfabricated and assembled on the same silicon substrate. The infrared source and the detector are monolithically integrated in the substrate. The Fabry-Perot interferometer is flip-chip bonded and the IC-circuit wire-bonded. The whole spectrometer assembly is in a DIL package, having holes for the incoming and outgoing radiation. The dimensions of the spectrometer silicon substrate are 5×15 mm².

U2 - 10.1109/SENSOR.1997.635463

DO - 10.1109/SENSOR.1997.635463

M3 - Conference article in proceedings

SN - 0-7803-3829-4

SP - 1257

EP - 1258

BT - Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)

PB - IEEE Institute of Electrical and Electronic Engineers

CY - Piscataway

T2 - International Solid State Sensors and Actuators Conference (Transducers '97)

Y2 - 16 June 1997 through 19 June 1997

ER -

A silicon microsystem-miniaturised infrared spectrometer

Abstract

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