A simple tungsten gate CMOS process

Hannu Ronkainen, Sami Franssila, Ilkka Suni

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Pages97-99
    Publication statusPublished - 1988
    MoE publication typeNot Eligible
    Event13th Nordic Semiconductor Meeting - Saltsjöbaden, Stockholm, Sweden
    Duration: 5 Jun 19888 Jun 1988

    Seminar

    Seminar13th Nordic Semiconductor Meeting
    CountrySweden
    CityStockholm
    Period5/06/888/06/88

    Cite this

    Ronkainen, H., Franssila, S., & Suni, I. (1988). A simple tungsten gate CMOS process. 97-99. Paper presented at 13th Nordic Semiconductor Meeting, Stockholm, Sweden.