A tunable THz filter based on electrostatic MEMS split ring resonator array

Z. Han, K. Kohno, Mäkelä Tapio, Haatainen, H. Fujita, K. Hirakawa, H. Toshiyoshi

Research output: Contribution to conferenceConference articleScientificpeer-review

Original languageEnglish
Publication statusPublished - 2014
Event7th Asia-pacific Conference on Transducers and Micro/nano Technologies, APCOT 2014
- Daegu, Korea, Republic of
Duration: 29 Jun 20142 Jul 2014

Conference

Conference7th Asia-pacific Conference on Transducers and Micro/nano Technologies, APCOT 2014
Abbreviated titleAPCOT 2014
CountryKorea, Republic of
CityDaegu
Period29/06/142/07/14

Keywords

  • MEMS

Cite this

Han, Z., Kohno, K., Tapio, M., Haatainen, Fujita, H., Hirakawa, K., & Toshiyoshi, H. (2014). A tunable THz filter based on electrostatic MEMS split ring resonator array. Paper presented at 7th Asia-pacific Conference on Transducers and Micro/nano Technologies, APCOT 2014
, Daegu, Korea, Republic of.