A tunable THz filter based on electrostatic MEMS split ring resonator array

Z. Han, K. Kohno, Tapio Mäkelä, Haatainen, H. Fujita, K. Hirakawa, H. Toshiyoshi

Research output: Contribution to conferenceConference articleScientificpeer-review

Original languageEnglish
Publication statusPublished - 2014
MoE publication typeNot Eligible
Event7th Asia-pacific Conference on Transducers and Micro/nano Technologies, APCOT 2014
- Daegu, Korea, Republic of
Duration: 29 Jun 20142 Jul 2014

Conference

Conference7th Asia-pacific Conference on Transducers and Micro/nano Technologies, APCOT 2014
Abbreviated titleAPCOT 2014
CountryKorea, Republic of
CityDaegu
Period29/06/142/07/14

Keywords

  • MEMS

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