AC and DC voltage standards based on silicon micromechanics

Mika Suhonen; Heikki Seppä; Aarne Oja; Marko Heinilä; Ismo Näkki

doi:10.1109/CPEM.1998.699739

AC and DC voltage standards based on silicon micromechanics

Mika Suhonen, Heikki Seppä, Aarne Oja, Marko Heinilä, Ismo Näkki

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

39 Citations (Scopus)

Abstract

Micromechanical AC and DC standards, suitable for compact, low-cost precision electronics applications are described. The standards are based on controlling the charge of a parallel-moving-plate capacitor. We expect that the voltage standards based on mechanical and geometrical properties of single crystalline silicon can have a high stability. We show the basic principle of the AC and DC standards and preliminary experiments with the AC voltage standard.

Original language	English
Title of host publication	1998 Conference on Precision Electromagnetic Measurements Digest
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	23-24
ISBN (Print)	978-0-7803-5018-2
DOIs	https://doi.org/10.1109/CPEM.1998.699739
Publication status	Published - 1998
MoE publication type	A4 Article in a conference publication
Event	Conference on Precision Electromagnetic Measurements, CPEM 98 - Washington, DC, United States Duration: 6 Jul 1998 → 10 Jul 1998

Conference

Conference	Conference on Precision Electromagnetic Measurements, CPEM 98
Country/Territory	United States
City	Washington, DC
Period	6/07/98 → 10/07/98

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10.1109/CPEM.1998.699739

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title = "AC and DC voltage standards based on silicon micromechanics",

abstract = "Micromechanical AC and DC standards, suitable for compact, low-cost precision electronics applications are described. The standards are based on controlling the charge of a parallel-moving-plate capacitor. We expect that the voltage standards based on mechanical and geometrical properties of single crystalline silicon can have a high stability. We show the basic principle of the AC and DC standards and preliminary experiments with the AC voltage standard.",

author = "Mika Suhonen and Heikki Sepp{\"a} and Aarne Oja and Marko Heinil{\"a} and Ismo N{\"a}kki",

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doi = "10.1109/CPEM.1998.699739",

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booktitle = "1998 Conference on Precision Electromagnetic Measurements Digest",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

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Suhonen, M, Seppä, H, Oja, A, Heinilä, M & Näkki, I 1998, AC and DC voltage standards based on silicon micromechanics. in 1998 Conference on Precision Electromagnetic Measurements Digest. IEEE Institute of Electrical and Electronic Engineers, pp. 23-24, Conference on Precision Electromagnetic Measurements, CPEM 98, Washington, DC, District of Columbia, United States, 6/07/98. https://doi.org/10.1109/CPEM.1998.699739

AC and DC voltage standards based on silicon micromechanics. / Suhonen, Mika; Seppä, Heikki; Oja, Aarne et al.
1998 Conference on Precision Electromagnetic Measurements Digest. IEEE Institute of Electrical and Electronic Engineers, 1998. p. 23-24.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - AC and DC voltage standards based on silicon micromechanics

AU - Suhonen, Mika

AU - Seppä, Heikki

AU - Oja, Aarne

AU - Heinilä, Marko

AU - Näkki, Ismo

PY - 1998

Y1 - 1998

N2 - Micromechanical AC and DC standards, suitable for compact, low-cost precision electronics applications are described. The standards are based on controlling the charge of a parallel-moving-plate capacitor. We expect that the voltage standards based on mechanical and geometrical properties of single crystalline silicon can have a high stability. We show the basic principle of the AC and DC standards and preliminary experiments with the AC voltage standard.

AB - Micromechanical AC and DC standards, suitable for compact, low-cost precision electronics applications are described. The standards are based on controlling the charge of a parallel-moving-plate capacitor. We expect that the voltage standards based on mechanical and geometrical properties of single crystalline silicon can have a high stability. We show the basic principle of the AC and DC standards and preliminary experiments with the AC voltage standard.

U2 - 10.1109/CPEM.1998.699739

DO - 10.1109/CPEM.1998.699739

M3 - Conference article in proceedings

SN - 978-0-7803-5018-2

SP - 23

EP - 24

BT - 1998 Conference on Precision Electromagnetic Measurements Digest

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - Conference on Precision Electromagnetic Measurements, CPEM 98

Y2 - 6 July 1998 through 10 July 1998

ER -

AC and DC voltage standards based on silicon micromechanics

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