AC and DC voltage standards based on silicon micromechanics

Mika Suhonen, Heikki Seppä, Aarne Oja, Marko Heinilä, Ismo Näkki

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

32 Citations (Scopus)

Abstract

Micromechanical AC and DC standards, suitable for compact, low-cost precision electronics applications are described. The standards are based on controlling the charge of a parallel-moving-plate capacitor. We expect that the voltage standards based on mechanical and geometrical properties of single crystalline silicon can have a high stability. We show the basic principle of the AC and DC standards and preliminary experiments with the AC voltage standard.
Original languageEnglish
Title of host publication1998 Conference on Precision Electromagnetic Measurements Digest
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages23-24
ISBN (Print)0-7803-5018-9
DOIs
Publication statusPublished - 1998
MoE publication typeB3 Non-refereed article in conference proceedings
EventConference on Precision Electromagnetic Measurements, CPEM 98 - Washington, DC, United States
Duration: 6 Jul 199810 Jul 1998

Conference

ConferenceConference on Precision Electromagnetic Measurements, CPEM 98
CountryUnited States
CityWashington, DC
Period6/07/9810/07/98

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