AC and DC voltage standards based on silicon micromechanics

Mika Suhonen, Heikki Seppä, Aarne Oja, Marko Heinilä, Ismo Näkki

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    39 Citations (Scopus)


    Micromechanical AC and DC standards, suitable for compact, low-cost precision electronics applications are described. The standards are based on controlling the charge of a parallel-moving-plate capacitor. We expect that the voltage standards based on mechanical and geometrical properties of single crystalline silicon can have a high stability. We show the basic principle of the AC and DC standards and preliminary experiments with the AC voltage standard.
    Original languageEnglish
    Title of host publication1998 Conference on Precision Electromagnetic Measurements Digest
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Print)978-0-7803-5018-2
    Publication statusPublished - 1998
    MoE publication typeA4 Article in a conference publication
    EventConference on Precision Electromagnetic Measurements, CPEM 98 - Washington, DC, United States
    Duration: 6 Jul 199810 Jul 1998


    ConferenceConference on Precision Electromagnetic Measurements, CPEM 98
    Country/TerritoryUnited States
    CityWashington, DC


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