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AC and DC voltage standards based on silicon micromechanics

  • Mika Suhonen
  • , Heikki Seppä
  • , Aarne Oja
  • , Marko Heinilä
  • , Ismo Näkki

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    39   Link opens in a new tab Citations (Scopus)

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