AC Voltage Reference Based on a Capacitive Micromechanical Component

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


The design and characterization of a high stability capacitive MEMS device intended for an AC voltage reference at 100 kHz or higher frequencies is presented. Preliminary results from a first prototype device show that the pull-in voltage of the device is stable to within 10 ppm over 60 hours. We discuss an optimised device design which is expected to show greater stability
Original languageEnglish
Title of host publicationConference on Prcision Electromagnetic Measurements, CPEM 2004
PublisherIEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)0-7803-8494-6
ISBN (Print)0-7803-8493-8
Publication statusPublished - 2004
MoE publication typeA4 Article in a conference publication

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