AC Voltage Reference Based on a Capacitive Micromechanical Component

Anu Kärkkäinen, Nadine Pesonen, Mika Suhonen, Jukka Kyynäräinen, A. Oja, Antti Manninen, Nikolai Tisnek, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


    The design and characterization of a high stability capacitive MEMS device intended for an AC voltage reference at 100 kHz or higher frequencies is presented. Preliminary results from a first prototype device show that the pull-in voltage of the device is stable to within 10 ppm over 60 hours. We discuss an optimised device design which is expected to show greater stability
    Original languageEnglish
    Title of host publicationConference on Prcision Electromagnetic Measurements, CPEM 2004
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)0-7803-8494-6
    ISBN (Print)0-7803-8493-8
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication


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