AC Voltage Reference Based on a Capacitive Micromechanical Component

Anu Kärkkäinen; Nadine Pesonen; Mika Suhonen; Jukka Kyynäräinen; A. Oja; Antti Manninen; Nikolai Tisnek; Heikki Seppä

doi:10.1109/CPEM.2004.305489

AC Voltage Reference Based on a Capacitive Micromechanical Component

Anu Kärkkäinen
, Nadine Pesonen
, Mika Suhonen
, Jukka Kyynäräinen
, A. Oja
, Antti Manninen
, Nikolai Tisnek
, Heikki Seppä

VTT (former employee or external)

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

The design and characterization of a high stability capacitive MEMS device intended for an AC voltage reference at 100 kHz or higher frequencies is presented. Preliminary results from a first prototype device show that the pull-in voltage of the device is stable to within 10 ppm over 60 hours. We discuss an optimised device design which is expected to show greater stability

Original language	English
Title of host publication	Conference on Prcision Electromagnetic Measurements, CPEM 2004
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	119-120
ISBN (Electronic)	978-0-7803-8494-1
ISBN (Print)	978-0-7803-8493-4
DOIs	https://doi.org/10.1109/CPEM.2004.305489
Publication status	Published - 2004
MoE publication type	A4 Article in a conference publication
Event	2004 Conference on Precision Electromagnetic Measurements, CPEM 2004 - London, United Kingdom Duration: 27 Jun 2004 → 2 Jul 2004

Conference

Conference	2004 Conference on Precision Electromagnetic Measurements, CPEM 2004
Country/Territory	United Kingdom
City	London
Period	27/06/04 → 2/07/04

Access to Document

10.1109/CPEM.2004.305489

Cite this

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title = "AC Voltage Reference Based on a Capacitive Micromechanical Component",

abstract = "The design and characterization of a high stability capacitive MEMS device intended for an AC voltage reference at 100 kHz or higher frequencies is presented. Preliminary results from a first prototype device show that the pull-in voltage of the device is stable to within 10 ppm over 60 hours. We discuss an optimised device design which is expected to show greater stability",

author = "Anu K{\"a}rkk{\"a}inen and Nadine Pesonen and Mika Suhonen and Jukka Kyyn{\"a}r{\"a}inen and A. Oja and Antti Manninen and Nikolai Tisnek and Heikki Sepp{\"a}",

year = "2004",

doi = "10.1109/CPEM.2004.305489",

language = "English",

isbn = "978-0-7803-8493-4",

pages = "119--120",

booktitle = "Conference on Prcision Electromagnetic Measurements, CPEM 2004",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "2004 Conference on Precision Electromagnetic Measurements, CPEM 2004 ; Conference date: 27-06-2004 Through 02-07-2004",

}

Kärkkäinen, A, Pesonen, N, Suhonen, M, Kyynäräinen, J, Oja, A, Manninen, A, Tisnek, N & Seppä, H 2004, AC Voltage Reference Based on a Capacitive Micromechanical Component. in Conference on Prcision Electromagnetic Measurements, CPEM 2004. IEEE Institute of Electrical and Electronic Engineers, pp. 119-120, 2004 Conference on Precision Electromagnetic Measurements, CPEM 2004, London, United Kingdom, 27/06/04. https://doi.org/10.1109/CPEM.2004.305489

AC Voltage Reference Based on a Capacitive Micromechanical Component. / Kärkkäinen, Anu; Pesonen, Nadine; Suhonen, Mika et al.
Conference on Prcision Electromagnetic Measurements, CPEM 2004. IEEE Institute of Electrical and Electronic Engineers, 2004. p. 119-120.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - AC Voltage Reference Based on a Capacitive Micromechanical Component

AU - Kärkkäinen, Anu

AU - Pesonen, Nadine

AU - Suhonen, Mika

AU - Kyynäräinen, Jukka

AU - Oja, A.

AU - Manninen, Antti

AU - Tisnek, Nikolai

AU - Seppä, Heikki

PY - 2004

Y1 - 2004

N2 - The design and characterization of a high stability capacitive MEMS device intended for an AC voltage reference at 100 kHz or higher frequencies is presented. Preliminary results from a first prototype device show that the pull-in voltage of the device is stable to within 10 ppm over 60 hours. We discuss an optimised device design which is expected to show greater stability

AB - The design and characterization of a high stability capacitive MEMS device intended for an AC voltage reference at 100 kHz or higher frequencies is presented. Preliminary results from a first prototype device show that the pull-in voltage of the device is stable to within 10 ppm over 60 hours. We discuss an optimised device design which is expected to show greater stability

U2 - 10.1109/CPEM.2004.305489

DO - 10.1109/CPEM.2004.305489

M3 - Conference article in proceedings

SN - 978-0-7803-8493-4

SP - 119

EP - 120

BT - Conference on Prcision Electromagnetic Measurements, CPEM 2004

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 2004 Conference on Precision Electromagnetic Measurements, CPEM 2004

Y2 - 27 June 2004 through 2 July 2004

ER -

AC Voltage Reference Based on a Capacitive Micromechanical Component

Abstract

Conference

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