AC Voltage Reference Based on a Capacitive Micromechanical Component

Anu Kärkkäinen, Nadine Pesonen, Mika Suhonen, Jukka Kyynäräinen, A. Oja, Antti Manninen, Nikolai Tisnek, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    Physics & Astronomy