Abstract
This chapter reviews phonon research in ultrathin
free-standing silicon membranes made of
silicon-on-insulator (SOI) wafers. The membranes are
stress-free and some are intentionally stressed. Their
fabrication is described in both cases. Calculations and
experimental work on confined acoustic phonons,
dispersion relations, phonon lifetimes, and transport
mechanisms in different phonon propagation regimes are
gathered to provide a comprehensive view of the
underlying physics.
| Original language | English |
|---|---|
| Title of host publication | Silicon Nanomembranes |
| Subtitle of host publication | Fundamental Science and Applications |
| Editors | John A. Rogers, Jong-Hyun Ahn |
| Publisher | Wiley |
| Chapter | 12 |
| Pages | 305-326 |
| ISBN (Electronic) | 978-3-527-69099-2, 978-3-527-69100-5 |
| ISBN (Print) | 978-3-527-33831-3 |
| DOIs | |
| Publication status | Published - 2016 |
| MoE publication type | D2 Article in professional manuals or guides or professional information systems or text book material |
Keywords
- Acoustic phonons
- Confined phonons
- Free-standing membranes
- Inelastic light scattering
- Laser Raman thermometry
- Nanofabrication
- Phonon dispersion relations
- Phononic crystals
- Thermal conductivity
- Ultrathin silicon-on-insulator