Acoustic phonons in ultrathin free-standing silicon membranes

Clivia M. Sotomayor Torres, Francesc Alzina, Andrey Shchepetov, Emigdio Chavez-Angel, John Cuffe, Bartlomiej Graczykowski, Mika Prunnila, Juan Sebastian Reparaz, Jouni Ahopelto

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

    Abstract

    This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.
    Original languageEnglish
    Title of host publicationSilicon Nanomembranes
    Subtitle of host publicationFundamental Science and Applications
    EditorsJohn A. Rogers, Jong-Hyun Ahn
    PublisherWiley
    Chapter12
    Pages305-326
    ISBN (Electronic)978-3-527-69099-2, 978-3-527-69100-5
    ISBN (Print)978-3-527-33831-3
    DOIs
    Publication statusPublished - 2016
    MoE publication typeD2 Article in professional manuals or guides or professional information systems or text book material

    Keywords

    • Acoustic phonons
    • Confined phonons
    • Free-standing membranes
    • Inelastic light scattering
    • Laser Raman thermometry
    • Nanofabrication
    • Phonon dispersion relations
    • Phononic crystals
    • Thermal conductivity
    • Ultrathin silicon-on-insulator

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  • Cite this

    Torres, C. M. S., Alzina, F., Shchepetov, A., Chavez-Angel, E., Cuffe, J., Graczykowski, B., Prunnila, M., Reparaz, J. S., & Ahopelto, J. (2016). Acoustic phonons in ultrathin free-standing silicon membranes. In J. A. Rogers, & J-H. Ahn (Eds.), Silicon Nanomembranes: Fundamental Science and Applications (pp. 305-326). Wiley. https://doi.org/10.1002/9783527691005.ch12