Acoustic phonons in ultrathin free-standing silicon membranes

Clivia M. Sotomayor Torres, Francesc Alzina, Andrey Shchepetov, Emigdio Chavez-Angel, John Cuffe, Bartlomiej Graczykowski, Mika Prunnila, Juan Sebastian Reparaz, Jouni Ahopelto

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

    Abstract

    This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.
    Original languageEnglish
    Title of host publicationSilicon Nanomembranes
    Subtitle of host publicationFundamental Science and Applications
    EditorsJohn A. Rogers, Jong-Hyun Ahn
    PublisherWiley
    Chapter12
    Pages305-326
    ISBN (Electronic)978-3-527-69099-2, 978-3-527-69100-5
    ISBN (Print)978-3-527-33831-3
    DOIs
    Publication statusPublished - 2016
    MoE publication typeD2 Article in professional manuals or guides or professional information systems or text book material

    Fingerprint

    phonons
    membranes
    acoustics
    silicon
    insulators
    wafers
    life (durability)
    fabrication
    physics
    propagation

    Keywords

    • Acoustic phonons
    • Confined phonons
    • Free-standing membranes
    • Inelastic light scattering
    • Laser Raman thermometry
    • Nanofabrication
    • Phonon dispersion relations
    • Phononic crystals
    • Thermal conductivity
    • Ultrathin silicon-on-insulator

    Cite this

    Torres, C. M. S., Alzina, F., Shchepetov, A., Chavez-Angel, E., Cuffe, J., Graczykowski, B., ... Ahopelto, J. (2016). Acoustic phonons in ultrathin free-standing silicon membranes. In J. A. Rogers, & J-H. Ahn (Eds.), Silicon Nanomembranes: Fundamental Science and Applications (pp. 305-326). Wiley. https://doi.org/10.1002/9783527691005.ch12
    Torres, Clivia M. Sotomayor ; Alzina, Francesc ; Shchepetov, Andrey ; Chavez-Angel, Emigdio ; Cuffe, John ; Graczykowski, Bartlomiej ; Prunnila, Mika ; Reparaz, Juan Sebastian ; Ahopelto, Jouni. / Acoustic phonons in ultrathin free-standing silicon membranes. Silicon Nanomembranes: Fundamental Science and Applications. editor / John A. Rogers ; Jong-Hyun Ahn. Wiley, 2016. pp. 305-326
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    abstract = "This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.",
    keywords = "Acoustic phonons, Confined phonons, Free-standing membranes, Inelastic light scattering, Laser Raman thermometry, Nanofabrication, Phonon dispersion relations, Phononic crystals, Thermal conductivity, Ultrathin silicon-on-insulator",
    author = "Torres, {Clivia M. Sotomayor} and Francesc Alzina and Andrey Shchepetov and Emigdio Chavez-Angel and John Cuffe and Bartlomiej Graczykowski and Mika Prunnila and Reparaz, {Juan Sebastian} and Jouni Ahopelto",
    year = "2016",
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    language = "English",
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    Torres, CMS, Alzina, F, Shchepetov, A, Chavez-Angel, E, Cuffe, J, Graczykowski, B, Prunnila, M, Reparaz, JS & Ahopelto, J 2016, Acoustic phonons in ultrathin free-standing silicon membranes. in JA Rogers & J-H Ahn (eds), Silicon Nanomembranes: Fundamental Science and Applications. Wiley, pp. 305-326. https://doi.org/10.1002/9783527691005.ch12

    Acoustic phonons in ultrathin free-standing silicon membranes. / Torres, Clivia M. Sotomayor; Alzina, Francesc; Shchepetov, Andrey; Chavez-Angel, Emigdio; Cuffe, John; Graczykowski, Bartlomiej; Prunnila, Mika; Reparaz, Juan Sebastian; Ahopelto, Jouni.

    Silicon Nanomembranes: Fundamental Science and Applications. ed. / John A. Rogers; Jong-Hyun Ahn. Wiley, 2016. p. 305-326.

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

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    AU - Torres, Clivia M. Sotomayor

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    AU - Shchepetov, Andrey

    AU - Chavez-Angel, Emigdio

    AU - Cuffe, John

    AU - Graczykowski, Bartlomiej

    AU - Prunnila, Mika

    AU - Reparaz, Juan Sebastian

    AU - Ahopelto, Jouni

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    N2 - This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.

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    KW - Confined phonons

    KW - Free-standing membranes

    KW - Inelastic light scattering

    KW - Laser Raman thermometry

    KW - Nanofabrication

    KW - Phonon dispersion relations

    KW - Phononic crystals

    KW - Thermal conductivity

    KW - Ultrathin silicon-on-insulator

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    Torres CMS, Alzina F, Shchepetov A, Chavez-Angel E, Cuffe J, Graczykowski B et al. Acoustic phonons in ultrathin free-standing silicon membranes. In Rogers JA, Ahn J-H, editors, Silicon Nanomembranes: Fundamental Science and Applications. Wiley. 2016. p. 305-326 https://doi.org/10.1002/9783527691005.ch12