Acoustic phonons in ultrathin free-standing silicon membranes

Clivia M. Sotomayor Torres, Francesc Alzina, Andrey Shchepetov, Emigdio Chavez-Angel, John Cuffe, Bartlomiej Graczykowski, Mika Prunnila, Juan Sebastian Reparaz, Jouni Ahopelto

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

Abstract

This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.
Original languageEnglish
Title of host publicationSilicon Nanomembranes
Subtitle of host publicationFundamental Science and Applications
EditorsJohn A. Rogers, Jong-Hyun Ahn
PublisherWiley
Chapter12
Pages305-326
ISBN (Electronic)978-3-527-69099-2, 978-3-527-69100-5
ISBN (Print)978-3-527-33831-3
DOIs
Publication statusPublished - 2016
MoE publication typeD2 Article in professional manuals or guides or professional information systems or text book material

Fingerprint

phonons
membranes
acoustics
silicon
insulators
wafers
life (durability)
fabrication
physics
propagation

Keywords

  • Acoustic phonons
  • Confined phonons
  • Free-standing membranes
  • Inelastic light scattering
  • Laser Raman thermometry
  • Nanofabrication
  • Phonon dispersion relations
  • Phononic crystals
  • Thermal conductivity
  • Ultrathin silicon-on-insulator

Cite this

Torres, C. M. S., Alzina, F., Shchepetov, A., Chavez-Angel, E., Cuffe, J., Graczykowski, B., ... Ahopelto, J. (2016). Acoustic phonons in ultrathin free-standing silicon membranes. In J. A. Rogers, & J-H. Ahn (Eds.), Silicon Nanomembranes: Fundamental Science and Applications (pp. 305-326). Wiley. https://doi.org/10.1002/9783527691005.ch12
Torres, Clivia M. Sotomayor ; Alzina, Francesc ; Shchepetov, Andrey ; Chavez-Angel, Emigdio ; Cuffe, John ; Graczykowski, Bartlomiej ; Prunnila, Mika ; Reparaz, Juan Sebastian ; Ahopelto, Jouni. / Acoustic phonons in ultrathin free-standing silicon membranes. Silicon Nanomembranes: Fundamental Science and Applications. editor / John A. Rogers ; Jong-Hyun Ahn. Wiley, 2016. pp. 305-326
@inbook{86e3b9f724ca41019303ebb51fcbeaef,
title = "Acoustic phonons in ultrathin free-standing silicon membranes",
abstract = "This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.",
keywords = "Acoustic phonons, Confined phonons, Free-standing membranes, Inelastic light scattering, Laser Raman thermometry, Nanofabrication, Phonon dispersion relations, Phononic crystals, Thermal conductivity, Ultrathin silicon-on-insulator",
author = "Torres, {Clivia M. Sotomayor} and Francesc Alzina and Andrey Shchepetov and Emigdio Chavez-Angel and John Cuffe and Bartlomiej Graczykowski and Mika Prunnila and Reparaz, {Juan Sebastian} and Jouni Ahopelto",
year = "2016",
doi = "10.1002/9783527691005.ch12",
language = "English",
isbn = "978-3-527-33831-3",
pages = "305--326",
editor = "Rogers, {John A.} and Jong-Hyun Ahn",
booktitle = "Silicon Nanomembranes",
publisher = "Wiley",
address = "United States",

}

Torres, CMS, Alzina, F, Shchepetov, A, Chavez-Angel, E, Cuffe, J, Graczykowski, B, Prunnila, M, Reparaz, JS & Ahopelto, J 2016, Acoustic phonons in ultrathin free-standing silicon membranes. in JA Rogers & J-H Ahn (eds), Silicon Nanomembranes: Fundamental Science and Applications. Wiley, pp. 305-326. https://doi.org/10.1002/9783527691005.ch12

Acoustic phonons in ultrathin free-standing silicon membranes. / Torres, Clivia M. Sotomayor; Alzina, Francesc; Shchepetov, Andrey; Chavez-Angel, Emigdio; Cuffe, John; Graczykowski, Bartlomiej; Prunnila, Mika; Reparaz, Juan Sebastian; Ahopelto, Jouni.

Silicon Nanomembranes: Fundamental Science and Applications. ed. / John A. Rogers; Jong-Hyun Ahn. Wiley, 2016. p. 305-326.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleProfessional

TY - CHAP

T1 - Acoustic phonons in ultrathin free-standing silicon membranes

AU - Torres, Clivia M. Sotomayor

AU - Alzina, Francesc

AU - Shchepetov, Andrey

AU - Chavez-Angel, Emigdio

AU - Cuffe, John

AU - Graczykowski, Bartlomiej

AU - Prunnila, Mika

AU - Reparaz, Juan Sebastian

AU - Ahopelto, Jouni

PY - 2016

Y1 - 2016

N2 - This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.

AB - This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.

KW - Acoustic phonons

KW - Confined phonons

KW - Free-standing membranes

KW - Inelastic light scattering

KW - Laser Raman thermometry

KW - Nanofabrication

KW - Phonon dispersion relations

KW - Phononic crystals

KW - Thermal conductivity

KW - Ultrathin silicon-on-insulator

U2 - 10.1002/9783527691005.ch12

DO - 10.1002/9783527691005.ch12

M3 - Chapter or book article

SN - 978-3-527-33831-3

SP - 305

EP - 326

BT - Silicon Nanomembranes

A2 - Rogers, John A.

A2 - Ahn, Jong-Hyun

PB - Wiley

ER -

Torres CMS, Alzina F, Shchepetov A, Chavez-Angel E, Cuffe J, Graczykowski B et al. Acoustic phonons in ultrathin free-standing silicon membranes. In Rogers JA, Ahn J-H, editors, Silicon Nanomembranes: Fundamental Science and Applications. Wiley. 2016. p. 305-326 https://doi.org/10.1002/9783527691005.ch12