Acoustic phonons in ultrathin free-standing silicon membranes

Clivia M. Sotomayor Torres; Francesc Alzina; Andrey Shchepetov; Emigdio Chavez-Angel; John Cuffe; Bartlomiej Graczykowski; Mika Prunnila; Juan Sebastian Reparaz; Jouni Ahopelto

doi:10.1002/9783527691005.ch12

Acoustic phonons in ultrathin free-standing silicon membranes

Clivia M. Sotomayor Torres
, Francesc Alzina
, Andrey Shchepetov
, Emigdio Chavez-Angel
, John Cuffe
, Bartlomiej Graczykowski
, Mika Prunnila
, Juan Sebastian Reparaz
, Jouni Ahopelto

Autonomous University of Barcelona
Johannes Gutenberg University Mainz
Catalan Institute of Nanoscience and Nanotechnology (ICN2)
Catalan Institution for Research and Advanced Studies (ICREA)
National University of Ireland

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional

1 Citation (Scopus)

Abstract

This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.

Original language	English
Title of host publication	Silicon Nanomembranes
Subtitle of host publication	Fundamental Science and Applications
Editors	John A. Rogers, Jong-Hyun Ahn
Publisher	Wiley
Chapter	12
Pages	305-326
ISBN (Electronic)	978-3-527-69099-2, 978-3-527-69100-5
ISBN (Print)	978-3-527-33831-3
DOIs	https://doi.org/10.1002/9783527691005.ch12
Publication status	Published - 2016
MoE publication type	D2 Article in professional manuals or guides or professional information systems or text book material

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Acoustic phonons
Confined phonons
Free-standing membranes
Inelastic light scattering
Laser Raman thermometry
Nanofabrication
Phonon dispersion relations
Phononic crystals
Thermal conductivity
Ultrathin silicon-on-insulator

Access to Document

10.1002/9783527691005.ch12

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Torres, C. M. S., Alzina, F., Shchepetov, A., Chavez-Angel, E., Cuffe, J., Graczykowski, B., Prunnila, M., Reparaz, J. S., & Ahopelto, J. (2016). Acoustic phonons in ultrathin free-standing silicon membranes. In J. A. Rogers, & J.-H. Ahn (Eds.), Silicon Nanomembranes: Fundamental Science and Applications (pp. 305-326). Wiley. https://doi.org/10.1002/9783527691005.ch12

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title = "Acoustic phonons in ultrathin free-standing silicon membranes",

abstract = "This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.",

keywords = "Acoustic phonons, Confined phonons, Free-standing membranes, Inelastic light scattering, Laser Raman thermometry, Nanofabrication, Phonon dispersion relations, Phononic crystals, Thermal conductivity, Ultrathin silicon-on-insulator",

author = "Torres, \{Clivia M. Sotomayor\} and Francesc Alzina and Andrey Shchepetov and Emigdio Chavez-Angel and John Cuffe and Bartlomiej Graczykowski and Mika Prunnila and Reparaz, \{Juan Sebastian\} and Jouni Ahopelto",

year = "2016",

doi = "10.1002/9783527691005.ch12",

language = "English",

isbn = "978-3-527-33831-3",

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T1 - Acoustic phonons in ultrathin free-standing silicon membranes

AU - Torres, Clivia M. Sotomayor

AU - Alzina, Francesc

AU - Shchepetov, Andrey

AU - Chavez-Angel, Emigdio

AU - Cuffe, John

AU - Graczykowski, Bartlomiej

AU - Prunnila, Mika

AU - Reparaz, Juan Sebastian

AU - Ahopelto, Jouni

PY - 2016

Y1 - 2016

N2 - This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.

AB - This chapter reviews phonon research in ultrathin free-standing silicon membranes made of silicon-on-insulator (SOI) wafers. The membranes are stress-free and some are intentionally stressed. Their fabrication is described in both cases. Calculations and experimental work on confined acoustic phonons, dispersion relations, phonon lifetimes, and transport mechanisms in different phonon propagation regimes are gathered to provide a comprehensive view of the underlying physics.

KW - Acoustic phonons

KW - Confined phonons

KW - Free-standing membranes

KW - Inelastic light scattering

KW - Laser Raman thermometry

KW - Nanofabrication

KW - Phonon dispersion relations

KW - Phononic crystals

KW - Thermal conductivity

KW - Ultrathin silicon-on-insulator

U2 - 10.1002/9783527691005.ch12

DO - 10.1002/9783527691005.ch12

M3 - Chapter or book article

SN - 978-3-527-33831-3

SP - 305

EP - 326

BT - Silicon Nanomembranes

A2 - Rogers, John A.

A2 - Ahn, Jong-Hyun

PB - Wiley

ER -

Acoustic phonons in ultrathin free-standing silicon membranes

Abstract

UN SDGs

Keywords

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