Acoustic wave resonator

Tuomas Pensala

Acoustic wave resonator

Tuomas Pensala (Inventor)

BA6201 RF microsystems

Research output: Patent › Patent

Abstract

An acoustic wave resonator comprising a piezoelectric layer and a drive electrode and a counter-electrode connected to the piezoelectric layer. The counter-electrode is adjacent to the drive electrode and the counter-electrode and the drive electrode together delimit a resonance region in the piezoelectric layer. The piezoelectric layer is made of a single-crystal piezoelectric material.

Patent family as of 14.7.2026
EP4540601 A1, FI131267 B, FI20225530 A, WO23242468 A1

Original language	English
Patent number	Fl 131267 B1
IPC	G01N29/02
Priority date	14/06/22
Filing date	14/06/22
Publication status	Published - 15 Jan 2025
MoE publication type	H1 Granted patent

Cite this

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title = "Acoustic wave resonator",

abstract = "An acoustic wave resonator comprising a piezoelectric layer and a drive electrode and a counter-electrode connected to the piezoelectric layer. The counter-electrode is adjacent to the drive electrode and the counter-electrode and the drive electrode together delimit a resonance region in the piezoelectric layer. The piezoelectric layer is made of a single-crystal piezoelectric material. Patent family as of 14.7.2026 EP4540601 A1, FI131267 B, FI20225530 A, WO23242468 A1",

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N2 - An acoustic wave resonator comprising a piezoelectric layer and a drive electrode and a counter-electrode connected to the piezoelectric layer. The counter-electrode is adjacent to the drive electrode and the counter-electrode and the drive electrode together delimit a resonance region in the piezoelectric layer. The piezoelectric layer is made of a single-crystal piezoelectric material. Patent family as of 14.7.2026 EP4540601 A1, FI131267 B, FI20225530 A, WO23242468 A1

AB - An acoustic wave resonator comprising a piezoelectric layer and a drive electrode and a counter-electrode connected to the piezoelectric layer. The counter-electrode is adjacent to the drive electrode and the counter-electrode and the drive electrode together delimit a resonance region in the piezoelectric layer. The piezoelectric layer is made of a single-crystal piezoelectric material. Patent family as of 14.7.2026 EP4540601 A1, FI131267 B, FI20225530 A, WO23242468 A1

UR - https://fi.espacenet.com/publicationDetails/biblio?II=0&ND=3&adjacent=true&locale=fi_FI&FT=D&date=20231221&CC=WO&NR=2023242468A1&KC=A1

M3 - Patent

M1 - Fl 131267 B1

Y2 - 2022/06/14

ER -

Acoustic wave resonator

Abstract

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