Active post-processing method to increase the electro-mechanical coupling in microresonators

Mika Koskenvuori, Pekka Rantakari, Juha Väisäsvaara, Ilkka Tittonen, Tomi Mattila, Aarne Oja, Ville Kaajakari, Heikki Seppä, Hannu Kattelus, Jyrki Kiihamäki

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationEurosensors XVII Book of Abstracts
Pages675-676
Publication statusPublished - 2003
MoE publication typeNot Eligible
Event17th European Conference on Solid-State Transducers, Eurosensors 2003 - Guimarães, Portugal
Duration: 21 Sep 200324 Sep 2003

Conference

Conference17th European Conference on Solid-State Transducers, Eurosensors 2003
CountryPortugal
CityGuimarães
Period21/09/0324/09/03

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