Active post-processing method to increase the electro-mechanical coupling in microresonators

Mika Koskenvuori, Pekka Rantakari, Juha Väisäsvaara, Ilkka Tittonen, Tomi Mattila, Aarne Oja, Ville Kaajakari, Heikki Seppä, Hannu Kattelus, Jyrki Kiihamäki

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationEurosensors XVII Book of Abstracts
    Pages675-676
    Publication statusPublished - 2003
    MoE publication typeNot Eligible
    Event17th European Conference on Solid-State Transducers, Eurosensors 2003 - Guimarães, Portugal
    Duration: 21 Sep 200324 Sep 2003

    Conference

    Conference17th European Conference on Solid-State Transducers, Eurosensors 2003
    CountryPortugal
    CityGuimarães
    Period21/09/0324/09/03

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