Active post-processing method to increase the electro-mechanical coupling in microresonators

Mika Koskenvuori; Pekka Rantakari; Juha Väisäsvaara; Ilkka Tittonen; Tomi Mattila; Aarne Oja; Ville Kaajakari; Heikki Seppä; Hannu Kattelus; Jyrki Kiihamäki

Active post-processing method to increase the electro-mechanical coupling in microresonators

Mika Koskenvuori
, Pekka Rantakari
, Juha Väisäsvaara
, Ilkka Tittonen
, Tomi Mattila
, Aarne Oja
, Ville Kaajakari
, Heikki Seppä
, Hannu Kattelus
, Jyrki Kiihamäki

Helsinki University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Eurosensors XVII Book of Abstracts
Pages	675-676
Publication status	Published - 2003
MoE publication type	Not Eligible
Event	17th European Conference on Solid-State Transducers, Eurosensors 2003 - Guimarães, Portugal Duration: 21 Sept 2003 → 24 Sept 2003

Conference

Conference	17th European Conference on Solid-State Transducers, Eurosensors 2003
Country/Territory	Portugal
City	Guimarães
Period	21/09/03 → 24/09/03

Access to Document

http://hdl.handle.net/1822/4837

Cite this

@inbook{2c2cc202b1d640a9b4d356a859e152b7,

title = "Active post-processing method to increase the electro-mechanical coupling in microresonators",

author = "Mika Koskenvuori and Pekka Rantakari and Juha V{\"a}is{\"a}svaara and Ilkka Tittonen and Tomi Mattila and Aarne Oja and Ville Kaajakari and Heikki Sepp{\"a} and Hannu Kattelus and Jyrki Kiiham{\"a}ki",

year = "2003",

language = "English",

isbn = "972-98603-1-9",

pages = "675--676",

booktitle = "Eurosensors XVII Book of Abstracts",

note = "17th European Conference on Solid-State Transducers, Eurosensors 2003 ; Conference date: 21-09-2003 Through 24-09-2003",

}

Koskenvuori, M, Rantakari, P, Väisäsvaara, J, Tittonen, I, Mattila, T, Oja, A, Kaajakari, V, Seppä, H, Kattelus, H & Kiihamäki, J 2003, Active post-processing method to increase the electro-mechanical coupling in microresonators. in Eurosensors XVII Book of Abstracts. pp. 675-676, 17th European Conference on Solid-State Transducers, Eurosensors 2003, Guimarães, Portugal, 21/09/03. <http://hdl.handle.net/1822/4837>

TY - CHAP

T1 - Active post-processing method to increase the electro-mechanical coupling in microresonators

AU - Koskenvuori, Mika

AU - Rantakari, Pekka

AU - Väisäsvaara, Juha

AU - Tittonen, Ilkka

AU - Mattila, Tomi

AU - Oja, Aarne

AU - Kaajakari, Ville

AU - Seppä, Heikki

AU - Kattelus, Hannu

AU - Kiihamäki, Jyrki

PY - 2003

Y1 - 2003

M3 - Conference abstract in proceedings

SN - 972-98603-1-9

SP - 675

EP - 676

BT - Eurosensors XVII Book of Abstracts

T2 - 17th European Conference on Solid-State Transducers, Eurosensors 2003

Y2 - 21 September 2003 through 24 September 2003

ER -