@inproceedings{fee62efd60244d1e98a1522d1f08448c,
title = "Active silicon support for DNA diagnostics",
keywords = "DNA, diagnostics, silicon, polymerace chain reaction, PCR, liquid cavities, silicon wafer",
author = "Ari Hokkanen and Joona Koponen and Kai Kolari and Ingmar Stuns",
note = "Project code: T2SU00225; Micromachining and Microfabrication 2003 ; Conference date: 25-01-2003 Through 31-01-2003",
year = "2003",
doi = "10.1117/12.472735",
language = "English",
isbn = "0-8194-4782-X",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
pages = "310--318",
booktitle = "Microfluidics, BioMEMS, and Medical Microsystems",
address = "United States",
}