Adhesion effects in nanoimprint lithography

C.M. Sotomayor Torres, S. Zankovych, J. Seekamp, H. Schulz, N. Roos, H.C. Scheer, K. Pfeiffer, F. Reuther, G. Grueztner, M. Fink, Tomi Haatainen, Jouni Ahopelto, I. Maximov, M. Beck, Montelius, C. Finder, C. Mayer, Ch. Cardinaud

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec, 2002
Place of PublicationSan Francisco
Pages68-69
Publication statusPublished - 2002
MoE publication typeNot Eligible
Event1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States
Duration: 11 Dec 200213 Dec 2002

Conference

Conference1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
Abbreviated titleNNT 2002
CountryUnited States
CitySan Francisco
Period11/12/0213/12/02

Keywords

  • Nanoimprint Lithography

Cite this

Sotomayor Torres, C. M., Zankovych, S., Seekamp, J., Schulz, H., Roos, N., Scheer, H. C., ... Cardinaud, C. (2002). Adhesion effects in nanoimprint lithography. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec, 2002 (pp. 68-69). San Francisco.
Sotomayor Torres, C.M. ; Zankovych, S. ; Seekamp, J. ; Schulz, H. ; Roos, N. ; Scheer, H.C. ; Pfeiffer, K. ; Reuther, F. ; Grueztner, G. ; Fink, M. ; Haatainen, Tomi ; Ahopelto, Jouni ; Maximov, I. ; Beck, M. ; Montelius ; Finder, C. ; Mayer, C. ; Cardinaud, Ch. / Adhesion effects in nanoimprint lithography. Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec, 2002. San Francisco, 2002. pp. 68-69
@inbook{9aa0164b16714c04b9325d2a9470bda7,
title = "Adhesion effects in nanoimprint lithography",
keywords = "Nanoimprint Lithography",
author = "{Sotomayor Torres}, C.M. and S. Zankovych and J. Seekamp and H. Schulz and N. Roos and H.C. Scheer and K. Pfeiffer and F. Reuther and G. Grueztner and M. Fink and Tomi Haatainen and Jouni Ahopelto and I. Maximov and M. Beck and Montelius and C. Finder and C. Mayer and Ch. Cardinaud",
year = "2002",
language = "English",
pages = "68--69",
booktitle = "Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec, 2002",

}

Sotomayor Torres, CM, Zankovych, S, Seekamp, J, Schulz, H, Roos, N, Scheer, HC, Pfeiffer, K, Reuther, F, Grueztner, G, Fink, M, Haatainen, T, Ahopelto, J, Maximov, I, Beck, M, Montelius, Finder, C, Mayer, C & Cardinaud, C 2002, Adhesion effects in nanoimprint lithography. in Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec, 2002. San Francisco, pp. 68-69, 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , San Francisco, United States, 11/12/02.

Adhesion effects in nanoimprint lithography. / Sotomayor Torres, C.M.; Zankovych, S.; Seekamp, J.; Schulz, H.; Roos, N.; Scheer, H.C.; Pfeiffer, K.; Reuther, F.; Grueztner, G.; Fink, M.; Haatainen, Tomi; Ahopelto, Jouni; Maximov, I.; Beck, M.; Montelius; Finder, C.; Mayer, C.; Cardinaud, Ch.

Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec, 2002. San Francisco, 2002. p. 68-69.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

TY - CHAP

T1 - Adhesion effects in nanoimprint lithography

AU - Sotomayor Torres, C.M.

AU - Zankovych, S.

AU - Seekamp, J.

AU - Schulz, H.

AU - Roos, N.

AU - Scheer, H.C.

AU - Pfeiffer, K.

AU - Reuther, F.

AU - Grueztner, G.

AU - Fink, M.

AU - Haatainen, Tomi

AU - Ahopelto, Jouni

AU - Maximov, I.

AU - Beck, M.

AU - Montelius, null

AU - Finder, C.

AU - Mayer, C.

AU - Cardinaud, Ch.

PY - 2002

Y1 - 2002

KW - Nanoimprint Lithography

M3 - Conference abstract in proceedings

SP - 68

EP - 69

BT - Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec, 2002

CY - San Francisco

ER -

Sotomayor Torres CM, Zankovych S, Seekamp J, Schulz H, Roos N, Scheer HC et al. Adhesion effects in nanoimprint lithography. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec, 2002. San Francisco. 2002. p. 68-69